Fabrication study of solid microneedles array using HNA

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents an approach far the process development of the out of plane silicon microneedles array fabrication. This study utilizes the wet etching technology using HNA to build a structure of sharp-tipped microneedles; biconvex-conical shaped. The height of the fabricated microneedle is 41.8μm and the tip radii is 1.4 μm. Investigation on the effect of varying the mask opening window had been carried out. The design approach and the fabrication process are well explained here.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages20-24
Number of pages5
DOIs
Publication statusPublished - 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur
Duration: 29 Nov 20061 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CityKuala Lumpur
Period29/11/061/12/06

Fingerprint

Fabrication
Wet etching
Masks
Silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Abd Aziz, N., & Yeop Majlis, B. (2006). Fabrication study of solid microneedles array using HNA. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 20-24). [4266562] https://doi.org/10.1109/SMELEC.2006.381012

Fabrication study of solid microneedles array using HNA. / Abd Aziz, Norazreen; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 20-24 4266562.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abd Aziz, N & Yeop Majlis, B 2006, Fabrication study of solid microneedles array using HNA. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4266562, pp. 20-24, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381012
Abd Aziz N, Yeop Majlis B. Fabrication study of solid microneedles array using HNA. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 20-24. 4266562 https://doi.org/10.1109/SMELEC.2006.381012
Abd Aziz, Norazreen ; Yeop Majlis, Burhanuddin. / Fabrication study of solid microneedles array using HNA. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. pp. 20-24
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