Fabrication of thermo-pneumatic driven microactuator for fluid transport applications

Norihan Abdul Hamid, Burhanuddin Yeop Majlis, Jumril Yunas, Azrul Azlan Hamzah, Mimiwaty Mohd Noor

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This paper describes simple fabrication process for a thermo-pneumatic driven MEMS microactuator for microfluid transport applications. The system consists of three different components namely a micro heater, a flexible thin film membrane and a diffuser/nozzle system. These three components were fabricated separately and were bonded together using anodic bonding at the final stage. The micro heater element was formed using surface micromachining technique, while the membrane and diffuser/nozzle system were fabricated using conventional bulk micromachining techniques. A 2 × 2 mm2, 4 μm thick flat polyimide membrane with 200 nm heater element built opposite the membrane's surface were successfully fabricated. Finite Element Analysis (FEA) method was performed to study the mechanical and physical behaviors of the thin film membrane as a microactuator in the system.

Original languageEnglish
Pages (from-to)2854-2859
Number of pages6
JournalAdvanced Science Letters
Volume19
Issue number10
DOIs
Publication statusPublished - Oct 2013

Fingerprint

Microactuator
Microactuators
Pneumatics
Fabrication
Membrane
membrane
Membranes
Fluid
Fluids
fluid
Microtechnology
Micromachining
Diffuser
Nozzle
Thin Films
Nozzles
Micro-Electrical-Mechanical Systems
Surface micromachining
Polyimide
Thin films

Keywords

  • KOH
  • MEMS
  • Microactuator
  • Microheater
  • Micropump
  • Thin film membrane

ASJC Scopus subject areas

  • Education
  • Health(social science)
  • Mathematics(all)
  • Energy(all)
  • Computer Science(all)
  • Environmental Science(all)
  • Engineering(all)

Cite this

Fabrication of thermo-pneumatic driven microactuator for fluid transport applications. / Hamid, Norihan Abdul; Yeop Majlis, Burhanuddin; Yunas, Jumril; Hamzah, Azrul Azlan; Noor, Mimiwaty Mohd.

In: Advanced Science Letters, Vol. 19, No. 10, 10.2013, p. 2854-2859.

Research output: Contribution to journalArticle

@article{7a8ae79723ef4efc8df4b5173e80d32f,
title = "Fabrication of thermo-pneumatic driven microactuator for fluid transport applications",
abstract = "This paper describes simple fabrication process for a thermo-pneumatic driven MEMS microactuator for microfluid transport applications. The system consists of three different components namely a micro heater, a flexible thin film membrane and a diffuser/nozzle system. These three components were fabricated separately and were bonded together using anodic bonding at the final stage. The micro heater element was formed using surface micromachining technique, while the membrane and diffuser/nozzle system were fabricated using conventional bulk micromachining techniques. A 2 × 2 mm2, 4 μm thick flat polyimide membrane with 200 nm heater element built opposite the membrane's surface were successfully fabricated. Finite Element Analysis (FEA) method was performed to study the mechanical and physical behaviors of the thin film membrane as a microactuator in the system.",
keywords = "KOH, MEMS, Microactuator, Microheater, Micropump, Thin film membrane",
author = "Hamid, {Norihan Abdul} and {Yeop Majlis}, Burhanuddin and Jumril Yunas and Hamzah, {Azrul Azlan} and Noor, {Mimiwaty Mohd}",
year = "2013",
month = "10",
doi = "10.1166/asl.2013.5103",
language = "English",
volume = "19",
pages = "2854--2859",
journal = "Advanced Science Letters",
issn = "1936-6612",
publisher = "American Scientific Publishers",
number = "10",

}

TY - JOUR

T1 - Fabrication of thermo-pneumatic driven microactuator for fluid transport applications

AU - Hamid, Norihan Abdul

AU - Yeop Majlis, Burhanuddin

AU - Yunas, Jumril

AU - Hamzah, Azrul Azlan

AU - Noor, Mimiwaty Mohd

PY - 2013/10

Y1 - 2013/10

N2 - This paper describes simple fabrication process for a thermo-pneumatic driven MEMS microactuator for microfluid transport applications. The system consists of three different components namely a micro heater, a flexible thin film membrane and a diffuser/nozzle system. These three components were fabricated separately and were bonded together using anodic bonding at the final stage. The micro heater element was formed using surface micromachining technique, while the membrane and diffuser/nozzle system were fabricated using conventional bulk micromachining techniques. A 2 × 2 mm2, 4 μm thick flat polyimide membrane with 200 nm heater element built opposite the membrane's surface were successfully fabricated. Finite Element Analysis (FEA) method was performed to study the mechanical and physical behaviors of the thin film membrane as a microactuator in the system.

AB - This paper describes simple fabrication process for a thermo-pneumatic driven MEMS microactuator for microfluid transport applications. The system consists of three different components namely a micro heater, a flexible thin film membrane and a diffuser/nozzle system. These three components were fabricated separately and were bonded together using anodic bonding at the final stage. The micro heater element was formed using surface micromachining technique, while the membrane and diffuser/nozzle system were fabricated using conventional bulk micromachining techniques. A 2 × 2 mm2, 4 μm thick flat polyimide membrane with 200 nm heater element built opposite the membrane's surface were successfully fabricated. Finite Element Analysis (FEA) method was performed to study the mechanical and physical behaviors of the thin film membrane as a microactuator in the system.

KW - KOH

KW - MEMS

KW - Microactuator

KW - Microheater

KW - Micropump

KW - Thin film membrane

UR - http://www.scopus.com/inward/record.url?scp=84876854435&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84876854435&partnerID=8YFLogxK

U2 - 10.1166/asl.2013.5103

DO - 10.1166/asl.2013.5103

M3 - Article

AN - SCOPUS:84876854435

VL - 19

SP - 2854

EP - 2859

JO - Advanced Science Letters

JF - Advanced Science Letters

SN - 1936-6612

IS - 10

ER -