Fabrication of platinum membrane on silicon for MEMS microphone

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 μm. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages9-13
Number of pages5
DOIs
Publication statusPublished - 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur
Duration: 29 Nov 20061 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CityKuala Lumpur
Period29/11/061/12/06

Fingerprint

Microphones
MEMS
Platinum
Membranes
Fabrication
Silicon
Silicon nitride
Nitrides
Chemical vapor deposition
Acoustics

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Hamzah, A. A., Yeop Majlis, B., & Ahmad, I. (2006). Fabrication of platinum membrane on silicon for MEMS microphone. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 9-13). [4266560] https://doi.org/10.1109/SMELEC.2006.381010

Fabrication of platinum membrane on silicon for MEMS microphone. / Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin; Ahmad, Ibrahim.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 9-13 4266560.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hamzah, AA, Yeop Majlis, B & Ahmad, I 2006, Fabrication of platinum membrane on silicon for MEMS microphone. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4266560, pp. 9-13, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381010
Hamzah AA, Yeop Majlis B, Ahmad I. Fabrication of platinum membrane on silicon for MEMS microphone. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 9-13. 4266560 https://doi.org/10.1109/SMELEC.2006.381010
Hamzah, Azrul Azlan ; Yeop Majlis, Burhanuddin ; Ahmad, Ibrahim. / Fabrication of platinum membrane on silicon for MEMS microphone. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. pp. 9-13
@inproceedings{7321a128fd304f60842468794d40525d,
title = "Fabrication of platinum membrane on silicon for MEMS microphone",
abstract = "Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 μm. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range.",
author = "Hamzah, {Azrul Azlan} and {Yeop Majlis}, Burhanuddin and Ibrahim Ahmad",
year = "2006",
doi = "10.1109/SMELEC.2006.381010",
language = "English",
isbn = "0780397312",
pages = "9--13",
booktitle = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",

}

TY - GEN

T1 - Fabrication of platinum membrane on silicon for MEMS microphone

AU - Hamzah, Azrul Azlan

AU - Yeop Majlis, Burhanuddin

AU - Ahmad, Ibrahim

PY - 2006

Y1 - 2006

N2 - Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 μm. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range.

AB - Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 μm. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range.

UR - http://www.scopus.com/inward/record.url?scp=35148861074&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=35148861074&partnerID=8YFLogxK

U2 - 10.1109/SMELEC.2006.381010

DO - 10.1109/SMELEC.2006.381010

M3 - Conference contribution

AN - SCOPUS:35148861074

SN - 0780397312

SN - 9780780397316

SP - 9

EP - 13

BT - IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

ER -