Fabrication of monolithic Wheatstone bridge circuit for piezoresistive microcantilever sensor

Rosminazuin Ab Rahim, Anis Nurashikin Nordin, Noreha Abd Malik, Badariah Bais, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresistive microcantilever formation, aluminum deposition of Wheatstone bridge interconnections and microcantilever release. The electrical discontinuity of interconnections which is one of the major issues encountered in the fabrication process is discussed and analyzed. Deposition of proper thickness of metal interconnection layers through metal evaporation process accompanied with annealing process at low temperature ensures complete electrical connections in the monolithic Wheatstone bridge configuration. Measurement of the fabricated Wheatstone bridge circuit shows a good agreement between theoretical and experimental values indicating successful fabrication of the device. Fabrication of piezoresistive microcantilever structure integrated with monolithic Wheatstone bridge circuit with resistance values in the range of 1 to 9 kΩ has been successfully realized using silicon micromachining technology.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479986255
DOIs
Publication statusPublished - 16 Jul 2015
Event17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 - Montpellier, France
Duration: 27 Apr 201530 Apr 2015

Other

Other17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
CountryFrance
CityMontpellier
Period27/4/1530/4/15

Fingerprint

Bridge circuits
Wheatstone bridges
Silicon
Fabrication
fabrication
sensors
Sensors
Micromachining
silicon
micromachining
Metals
Aluminum
metals
discontinuity
Evaporation
evaporation
Annealing
aluminum
annealing
Substrates

Keywords

  • MEMS piezoresistive microcantilever
  • metal evaporation
  • Wheatstone bridge circuit

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Rahim, R. A., Nordin, A. N., Malik, N. A., Bais, B., & Yeop Majlis, B. (2015). Fabrication of monolithic Wheatstone bridge circuit for piezoresistive microcantilever sensor. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 [7160998] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2015.7160998

Fabrication of monolithic Wheatstone bridge circuit for piezoresistive microcantilever sensor. / Rahim, Rosminazuin Ab; Nordin, Anis Nurashikin; Malik, Noreha Abd; Bais, Badariah; Yeop Majlis, Burhanuddin.

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7160998.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rahim, RA, Nordin, AN, Malik, NA, Bais, B & Yeop Majlis, B 2015, Fabrication of monolithic Wheatstone bridge circuit for piezoresistive microcantilever sensor. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015., 7160998, Institute of Electrical and Electronics Engineers Inc., 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015, Montpellier, France, 27/4/15. https://doi.org/10.1109/DTIP.2015.7160998
Rahim RA, Nordin AN, Malik NA, Bais B, Yeop Majlis B. Fabrication of monolithic Wheatstone bridge circuit for piezoresistive microcantilever sensor. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 7160998 https://doi.org/10.1109/DTIP.2015.7160998
Rahim, Rosminazuin Ab ; Nordin, Anis Nurashikin ; Malik, Noreha Abd ; Bais, Badariah ; Yeop Majlis, Burhanuddin. / Fabrication of monolithic Wheatstone bridge circuit for piezoresistive microcantilever sensor. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. Institute of Electrical and Electronics Engineers Inc., 2015.
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