Fabrication of MEMS based microspeaker using bulk micromachining technique

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

The advantages of micromachining over conventional fabrication include precise dimensional control, integration of on-chip circuits and potential low cost owning to batch processing. Fabrication microspeaker for hearing instrument application using MEMS technology is challenging because of certain critical requirements, including their small size, low driving voltage, high output sound pressure level, flat frequency response and low energy consumption. A small in size, lightweight, and low cost microspeaker is demanded for application such as cellular phones and hearing aids. The device consist of two part; first parts is a micro machined polyimide membrane as the sound generating plate, where the voice coil placed on the top of membrane, and the coil is a single loop voice coil. The second part is back plate permanent magnet. The disc permanent magnet bonded on acoustic hole plate is Neodymium-Iron-Boron (NdFeB) with magnetization of 1.45 T, diameter 1.6 mm, and thickness 0.8 mm. The fabrication process and performance of the first result device is discussed, and the thickness of electroplated single loop voice coil copper 10 μm and acoustic hole bonded together. The total size of the microspeaker chip is 5 mm × 5 mm × 1.5 mm, polyimide membrane thickness 2 μm.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages171-174
Number of pages4
Volume254
DOIs
Publication statusPublished - 2011
EventInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS - Suntec
Duration: 26 Jun 20111 Jul 2011

Publication series

NameAdvanced Materials Research
Volume254
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS
CitySuntec
Period26/6/111/7/11

Fingerprint

Micromachining
MEMS
Membranes
Polyimides
Fabrication
Permanent magnets
Acoustics
Acoustic waves
Hearing aids
Neodymium
Audition
Frequency response
Boron
Costs
Magnetization
Energy utilization
Iron
Copper
Networks (circuits)
Electric potential

Keywords

  • Actuator
  • Anisotropic wet etching
  • Bulk micromachining
  • MEMS
  • Microspeaker
  • Polyimide membrane

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Sugandi, G., & Yeop Majlis, B. (2011). Fabrication of MEMS based microspeaker using bulk micromachining technique. In Advanced Materials Research (Vol. 254, pp. 171-174). (Advanced Materials Research; Vol. 254). https://doi.org/10.4028/www.scientific.net/AMR.254.171

Fabrication of MEMS based microspeaker using bulk micromachining technique. / Sugandi, Gandi; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 254 2011. p. 171-174 (Advanced Materials Research; Vol. 254).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sugandi, G & Yeop Majlis, B 2011, Fabrication of MEMS based microspeaker using bulk micromachining technique. in Advanced Materials Research. vol. 254, Advanced Materials Research, vol. 254, pp. 171-174, International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS, Suntec, 26/6/11. https://doi.org/10.4028/www.scientific.net/AMR.254.171
Sugandi G, Yeop Majlis B. Fabrication of MEMS based microspeaker using bulk micromachining technique. In Advanced Materials Research. Vol. 254. 2011. p. 171-174. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.254.171
Sugandi, Gandi ; Yeop Majlis, Burhanuddin. / Fabrication of MEMS based microspeaker using bulk micromachining technique. Advanced Materials Research. Vol. 254 2011. pp. 171-174 (Advanced Materials Research).
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