Fabrication of interdigitated microelectrodes for CuO nanowires I-V measurement

Tiong Teck Yaw, Chang Fu Dee, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis, Muhamad Mat Salleh, Mohd Faizal, Saadah Abdul Rahman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An interdigitated electrode consisted of 50 pairs of 5 μm wide microelectrodes, separated by 5 μm gap has been fabricated using single layer positive photoresist lift-off process. The effect of UV exposure time to electrode width and photoresist overcut angle were optimized for the fabrication of an array interdigitated electrodes. The fabricated interdigitated electrode has been used to measure the electrical properties of thick film and nanowires sample. The Cu2O film and CuO nanowires have been contacted on the aluminium interdigitated electrode through the joule heating technique. Schottky behaviour based I-V characteristics of both Cu2O film and CuO nanowires were observed at room temperature. The formation of schottky barrier on the sample has been discussed.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages193-196
Number of pages4
ISBN (Print)9781479957606
DOIs
Publication statusPublished - 10 Oct 2014
Event11th IEEE International Conference on Semiconductor Electronics, ICSE 2014 - Kuala Lumpur
Duration: 27 Aug 201429 Aug 2014

Other

Other11th IEEE International Conference on Semiconductor Electronics, ICSE 2014
CityKuala Lumpur
Period27/8/1429/8/14

Fingerprint

Microelectrodes
Nanowires
Fabrication
Electrodes
Photoresists
Joule heating
Aluminum
Thick films
Electric properties
Temperature

Keywords

  • CuO
  • CuO
  • Interdigitated microelectrodes
  • Nanowires
  • Photolithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Yaw, T. T., Dee, C. F., Hamzah, A. A., Yeop Majlis, B., Mat Salleh, M., Faizal, M., & Rahman, S. A. (2014). Fabrication of interdigitated microelectrodes for CuO nanowires I-V measurement. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 193-196). [6920829] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2014.6920829

Fabrication of interdigitated microelectrodes for CuO nanowires I-V measurement. / Yaw, Tiong Teck; Dee, Chang Fu; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin; Mat Salleh, Muhamad; Faizal, Mohd; Rahman, Saadah Abdul.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. p. 193-196 6920829.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yaw, TT, Dee, CF, Hamzah, AA, Yeop Majlis, B, Mat Salleh, M, Faizal, M & Rahman, SA 2014, Fabrication of interdigitated microelectrodes for CuO nanowires I-V measurement. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 6920829, Institute of Electrical and Electronics Engineers Inc., pp. 193-196, 11th IEEE International Conference on Semiconductor Electronics, ICSE 2014, Kuala Lumpur, 27/8/14. https://doi.org/10.1109/SMELEC.2014.6920829
Yaw TT, Dee CF, Hamzah AA, Yeop Majlis B, Mat Salleh M, Faizal M et al. Fabrication of interdigitated microelectrodes for CuO nanowires I-V measurement. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc. 2014. p. 193-196. 6920829 https://doi.org/10.1109/SMELEC.2014.6920829
Yaw, Tiong Teck ; Dee, Chang Fu ; Hamzah, Azrul Azlan ; Yeop Majlis, Burhanuddin ; Mat Salleh, Muhamad ; Faizal, Mohd ; Rahman, Saadah Abdul. / Fabrication of interdigitated microelectrodes for CuO nanowires I-V measurement. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 193-196
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