Fabrication of glucose sensitive actuator for DDS micro valve

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A glucose sensitive actuator for drug delivery system (DDS) consists of silicon boss, micro channel and outlet of the microvalve.The microchannel is essential to carry liquid samples in the system. In this paper, two types of microchannel, rectangular and trapezoidal, were fabricated using anisotropic etching of Deep-RIE and wet chemical etching using KOH solution, respectively. Fabrication were done for micro channels with cross sectional width of 100 -120μm width and length of 2 mm.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages287-290
Number of pages4
Volume74
DOIs
Publication statusPublished - 2009
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore
Duration: 28 Jun 20093 Jul 2009

Publication series

NameAdvanced Materials Research
Volume74
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT 2009
CitySingpore
Period28/6/093/7/09

Fingerprint

Microchannels
Glucose
Actuators
Fabrication
Anisotropic etching
Wet etching
Reactive ion etching
Silicon
Liquids
Drug Delivery Systems

Keywords

  • Glucose actuator
  • MEMS
  • Micro channel
  • Micro valve

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Dzulkefli, N. A., Bais, B., & Yeop Majlis, B. (2009). Fabrication of glucose sensitive actuator for DDS micro valve. In Advanced Materials Research (Vol. 74, pp. 287-290). (Advanced Materials Research; Vol. 74). https://doi.org/10.4028/www.scientific.net/AMR.74.287

Fabrication of glucose sensitive actuator for DDS micro valve. / Dzulkefli, N. A.; Bais, Badariah; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 74 2009. p. 287-290 (Advanced Materials Research; Vol. 74).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dzulkefli, NA, Bais, B & Yeop Majlis, B 2009, Fabrication of glucose sensitive actuator for DDS micro valve. in Advanced Materials Research. vol. 74, Advanced Materials Research, vol. 74, pp. 287-290, International Conference on Materials for Advanced Technologies, ICMAT 2009, Singpore, 28/6/09. https://doi.org/10.4028/www.scientific.net/AMR.74.287
Dzulkefli NA, Bais B, Yeop Majlis B. Fabrication of glucose sensitive actuator for DDS micro valve. In Advanced Materials Research. Vol. 74. 2009. p. 287-290. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.74.287
Dzulkefli, N. A. ; Bais, Badariah ; Yeop Majlis, Burhanuddin. / Fabrication of glucose sensitive actuator for DDS micro valve. Advanced Materials Research. Vol. 74 2009. pp. 287-290 (Advanced Materials Research).
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