Fabrication and testing of electromagnetic MEMS microactuator utilizing PCB based planar micro-coil

R. E. Pawinanto, Jumril Yunas, Burhanuddin Yeop Majlis, Badariah Bais, Muzalifah Mohd Said

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

An electromagnetic MEMS actuator with planar electromagnetic micro-coil on a PCB (Printed Circuit Board) is reported. The microactuator device consists of permanent magnet made of NdFeB, silicon based membrane and planar micro-coil electroplated on PCB. Each part of the system was fabricated using simple MEMS technique and bonded together using epoxy material. The performance of the fabricated device was tested by measuring the deflection capability of the silicon membrane. The measurement results showed that a planar spiral micro-coil is able to generate magnetic flux density and to deform a 20 μm thin silicon membrane with a maximum deflection height of 12.87 μm. The functionality of the actuator system was tested by measuring the dynamic response in a period of 50 seconds. Test on planar parallel round micro-coil resulted in a maximum membrane displacement in 40 s for all tested input power from 100 to 1000 mWatt. The results from this study will benefit the future development of electromagnetic MEMS actuator for integrated micropump.

Original languageEnglish
Pages (from-to)8399-8403
Number of pages5
JournalARPN Journal of Engineering and Applied Sciences
Volume10
Issue number18
Publication statusPublished - 2015

Fingerprint

Microactuators
Printed circuit boards
MEMS
Membranes
Fabrication
Actuators
Testing
Silicon
Magnetic flux
Permanent magnets
Dynamic response

Keywords

  • Electromagnetic actuator
  • MEMS fabrication
  • PCB
  • Planar micro-coil

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Fabrication and testing of electromagnetic MEMS microactuator utilizing PCB based planar micro-coil. / Pawinanto, R. E.; Yunas, Jumril; Yeop Majlis, Burhanuddin; Bais, Badariah; Said, Muzalifah Mohd.

In: ARPN Journal of Engineering and Applied Sciences, Vol. 10, No. 18, 2015, p. 8399-8403.

Research output: Contribution to journalArticle

@article{c76344b4805c47dab6c26c64a74eb2d5,
title = "Fabrication and testing of electromagnetic MEMS microactuator utilizing PCB based planar micro-coil",
abstract = "An electromagnetic MEMS actuator with planar electromagnetic micro-coil on a PCB (Printed Circuit Board) is reported. The microactuator device consists of permanent magnet made of NdFeB, silicon based membrane and planar micro-coil electroplated on PCB. Each part of the system was fabricated using simple MEMS technique and bonded together using epoxy material. The performance of the fabricated device was tested by measuring the deflection capability of the silicon membrane. The measurement results showed that a planar spiral micro-coil is able to generate magnetic flux density and to deform a 20 μm thin silicon membrane with a maximum deflection height of 12.87 μm. The functionality of the actuator system was tested by measuring the dynamic response in a period of 50 seconds. Test on planar parallel round micro-coil resulted in a maximum membrane displacement in 40 s for all tested input power from 100 to 1000 mWatt. The results from this study will benefit the future development of electromagnetic MEMS actuator for integrated micropump.",
keywords = "Electromagnetic actuator, MEMS fabrication, PCB, Planar micro-coil",
author = "Pawinanto, {R. E.} and Jumril Yunas and {Yeop Majlis}, Burhanuddin and Badariah Bais and Said, {Muzalifah Mohd}",
year = "2015",
language = "English",
volume = "10",
pages = "8399--8403",
journal = "ARPN Journal of Engineering and Applied Sciences",
issn = "1819-6608",
publisher = "Asian Research Publishing Network (ARPN)",
number = "18",

}

TY - JOUR

T1 - Fabrication and testing of electromagnetic MEMS microactuator utilizing PCB based planar micro-coil

AU - Pawinanto, R. E.

AU - Yunas, Jumril

AU - Yeop Majlis, Burhanuddin

AU - Bais, Badariah

AU - Said, Muzalifah Mohd

PY - 2015

Y1 - 2015

N2 - An electromagnetic MEMS actuator with planar electromagnetic micro-coil on a PCB (Printed Circuit Board) is reported. The microactuator device consists of permanent magnet made of NdFeB, silicon based membrane and planar micro-coil electroplated on PCB. Each part of the system was fabricated using simple MEMS technique and bonded together using epoxy material. The performance of the fabricated device was tested by measuring the deflection capability of the silicon membrane. The measurement results showed that a planar spiral micro-coil is able to generate magnetic flux density and to deform a 20 μm thin silicon membrane with a maximum deflection height of 12.87 μm. The functionality of the actuator system was tested by measuring the dynamic response in a period of 50 seconds. Test on planar parallel round micro-coil resulted in a maximum membrane displacement in 40 s for all tested input power from 100 to 1000 mWatt. The results from this study will benefit the future development of electromagnetic MEMS actuator for integrated micropump.

AB - An electromagnetic MEMS actuator with planar electromagnetic micro-coil on a PCB (Printed Circuit Board) is reported. The microactuator device consists of permanent magnet made of NdFeB, silicon based membrane and planar micro-coil electroplated on PCB. Each part of the system was fabricated using simple MEMS technique and bonded together using epoxy material. The performance of the fabricated device was tested by measuring the deflection capability of the silicon membrane. The measurement results showed that a planar spiral micro-coil is able to generate magnetic flux density and to deform a 20 μm thin silicon membrane with a maximum deflection height of 12.87 μm. The functionality of the actuator system was tested by measuring the dynamic response in a period of 50 seconds. Test on planar parallel round micro-coil resulted in a maximum membrane displacement in 40 s for all tested input power from 100 to 1000 mWatt. The results from this study will benefit the future development of electromagnetic MEMS actuator for integrated micropump.

KW - Electromagnetic actuator

KW - MEMS fabrication

KW - PCB

KW - Planar micro-coil

UR - http://www.scopus.com/inward/record.url?scp=84944937618&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84944937618&partnerID=8YFLogxK

M3 - Article

VL - 10

SP - 8399

EP - 8403

JO - ARPN Journal of Engineering and Applied Sciences

JF - ARPN Journal of Engineering and Applied Sciences

SN - 1819-6608

IS - 18

ER -