Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates

D. Hernandez Cruz, Pankaj Kumar Choudhury, Bendida Sahouli, Amir Tork, Roger A. Lessard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The characteristics of thin BaTiO3 films deposited on Si and MgO substrates by employing the metal-organic deposition technique are studied. In the experiment, the commercial barium 2-ethyihexanoate and the synthesized titanium dimethoxy dineodecanoate are used as precursors for the formation of BaTiO3 films. The film characterization is performed by X-ray diffraction and the scanning electron microscopy. The obtained results show that the prepared films have nearly good stoichiometry and the obtained tetragonal structure properties of BaTiO3 indicates that these may fmd some possible optical/electrical applications in the field ofintegrated optics technology.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages624-628
Number of pages5
Volume4087
DOIs
Publication statusPublished - 2004
Externally publishedYes
EventApplications of Photonic Technology 4 - Quebec City, QC, Canada
Duration: 12 Jun 200012 Jun 2000

Other

OtherApplications of Photonic Technology 4
CountryCanada
CityQuebec City, QC
Period12/6/0012/6/00

Fingerprint

Magnesium Oxide
Ferroelectric films
Barium titanate
magnesium oxides
Magnesium
Magnesia
Silicon oxides
silicon oxides
barium
Oxides
Fabrication
Silicon
Substrate
fabrication
Substrates
Stoichiometry
Titanium
Barium
Scanning Electron Microscopy
X-ray Diffraction

Keywords

  • Ferroelectric thin films
  • Optical materials

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Hernandez Cruz, D., Choudhury, P. K., Sahouli, B., Tork, A., & Lessard, R. A. (2004). Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4087, pp. 624-628) https://doi.org/10.1117/12.406461

Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates. / Hernandez Cruz, D.; Choudhury, Pankaj Kumar; Sahouli, Bendida; Tork, Amir; Lessard, Roger A.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4087 2004. p. 624-628.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hernandez Cruz, D, Choudhury, PK, Sahouli, B, Tork, A & Lessard, RA 2004, Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 4087, pp. 624-628, Applications of Photonic Technology 4, Quebec City, QC, Canada, 12/6/00. https://doi.org/10.1117/12.406461
Hernandez Cruz D, Choudhury PK, Sahouli B, Tork A, Lessard RA. Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4087. 2004. p. 624-628 https://doi.org/10.1117/12.406461
Hernandez Cruz, D. ; Choudhury, Pankaj Kumar ; Sahouli, Bendida ; Tork, Amir ; Lessard, Roger A. / Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4087 2004. pp. 624-628
@inproceedings{8c3329a7136c4eb08ec674dc9ca51711,
title = "Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates",
abstract = "The characteristics of thin BaTiO3 films deposited on Si and MgO substrates by employing the metal-organic deposition technique are studied. In the experiment, the commercial barium 2-ethyihexanoate and the synthesized titanium dimethoxy dineodecanoate are used as precursors for the formation of BaTiO3 films. The film characterization is performed by X-ray diffraction and the scanning electron microscopy. The obtained results show that the prepared films have nearly good stoichiometry and the obtained tetragonal structure properties of BaTiO3 indicates that these may fmd some possible optical/electrical applications in the field ofintegrated optics technology.",
keywords = "Ferroelectric thin films, Optical materials",
author = "{Hernandez Cruz}, D. and Choudhury, {Pankaj Kumar} and Bendida Sahouli and Amir Tork and Lessard, {Roger A.}",
year = "2004",
doi = "10.1117/12.406461",
language = "English",
volume = "4087",
pages = "624--628",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates

AU - Hernandez Cruz, D.

AU - Choudhury, Pankaj Kumar

AU - Sahouli, Bendida

AU - Tork, Amir

AU - Lessard, Roger A.

PY - 2004

Y1 - 2004

N2 - The characteristics of thin BaTiO3 films deposited on Si and MgO substrates by employing the metal-organic deposition technique are studied. In the experiment, the commercial barium 2-ethyihexanoate and the synthesized titanium dimethoxy dineodecanoate are used as precursors for the formation of BaTiO3 films. The film characterization is performed by X-ray diffraction and the scanning electron microscopy. The obtained results show that the prepared films have nearly good stoichiometry and the obtained tetragonal structure properties of BaTiO3 indicates that these may fmd some possible optical/electrical applications in the field ofintegrated optics technology.

AB - The characteristics of thin BaTiO3 films deposited on Si and MgO substrates by employing the metal-organic deposition technique are studied. In the experiment, the commercial barium 2-ethyihexanoate and the synthesized titanium dimethoxy dineodecanoate are used as precursors for the formation of BaTiO3 films. The film characterization is performed by X-ray diffraction and the scanning electron microscopy. The obtained results show that the prepared films have nearly good stoichiometry and the obtained tetragonal structure properties of BaTiO3 indicates that these may fmd some possible optical/electrical applications in the field ofintegrated optics technology.

KW - Ferroelectric thin films

KW - Optical materials

UR - http://www.scopus.com/inward/record.url?scp=84875438171&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84875438171&partnerID=8YFLogxK

U2 - 10.1117/12.406461

DO - 10.1117/12.406461

M3 - Conference contribution

AN - SCOPUS:84875438171

VL - 4087

SP - 624

EP - 628

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -