Fabrication and characterization of glass-based MEMS transformer with single layer coil structure

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A single layer micro-transformer with square interwinding coil geometry has been developed. The transformers were fabricated on a high resistive glass substrate using MEMS surface micromachining. The fabricated micro-transformer was measured and compared with the simulation. Its characteristics are studied in wide range of operating frequency. As the results, Q-factor as high as 1.95, minimum insertion loss of-4.1 dB at 720 MHz and resonance frequency of 580 MHz were achieved which show a good prospect in various RF-ICs applications.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages221-226
Number of pages6
DOIs
Publication statusPublished - 2008
Event2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008 - Johor Bahru, Johor
Duration: 25 Nov 200827 Nov 2008

Other

Other2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008
CityJohor Bahru, Johor
Period25/11/0827/11/08

Fingerprint

Surface micromachining
Insertion losses
MEMS
Fabrication
Glass
Geometry
Substrates

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Yunas, J., & Yeop Majlis, B. (2008). Fabrication and characterization of glass-based MEMS transformer with single layer coil structure. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 221-226). [4770312] https://doi.org/10.1109/SMELEC.2008.4770312

Fabrication and characterization of glass-based MEMS transformer with single layer coil structure. / Yunas, Jumril; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. p. 221-226 4770312.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yunas, J & Yeop Majlis, B 2008, Fabrication and characterization of glass-based MEMS transformer with single layer coil structure. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4770312, pp. 221-226, 2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008, Johor Bahru, Johor, 25/11/08. https://doi.org/10.1109/SMELEC.2008.4770312
Yunas J, Yeop Majlis B. Fabrication and characterization of glass-based MEMS transformer with single layer coil structure. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. p. 221-226. 4770312 https://doi.org/10.1109/SMELEC.2008.4770312
Yunas, Jumril ; Yeop Majlis, Burhanuddin. / Fabrication and characterization of glass-based MEMS transformer with single layer coil structure. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. pp. 221-226
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