Fabrication and analysis of micro contact based probe cell for IC testing

M. Idzdihar Idris, Nowshad Amin, M. A. Azam, F. Salehuddin, Z. A. Ghani

Research output: Contribution to journalArticle

Abstract

This study presents the fabrication process and analysis of micro contact probe cell for IC testing deposited by dc sputtering technique on a glass substrate. It is designed to solve and replace pogo pins in IC testing process. In previous study, the new model of test socket with new materials in different shapes were designed by using ANSYS as Finite Element Analysis (FEA) software and the best parameter were obtained. According to the optimized parameters, prototype structures of the micro-contacts are fabricated using DC Sputtering with materials like copper and tungsten on base copper on glass substrates. Micro contact with thickness of 2800-7000 nm were successively deposited on glass substrate at sputtering power of 125 W in argon ambient gas with pressure of 10-15×10<sup>-3</sup> Torr at a room temperature. The structural and electrical properties of micro contact were investigated by using profilometer, Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and four point probes. Results show that the film thickness increased as the deposition the time getting longer. The Root Mean Square (RMS) roughnesses obtained are all in a good quality. On the other hand, the resistivity of micro contacts was less than 4 uω-cm, which has good conductive properties. Consequently, this design is appropriate for replacing the conventional pogo pin based testing tools.

Original languageEnglish
Pages (from-to)376-384
Number of pages9
JournalResearch Journal of Applied Sciences, Engineering and Technology
Volume10
Issue number4
Publication statusPublished - 2015

Fingerprint

Sputtering
Fabrication
Glass
Testing
Substrates
Copper
Tungsten
Film thickness
Argon
Structural properties
Atomic force microscopy
Electric properties
Surface roughness
Finite element method
Scanning electron microscopy
Gases
Temperature

Keywords

  • DC sputtering deposition
  • Micro contact
  • Pogo pin
  • Test socket

ASJC Scopus subject areas

  • Engineering(all)
  • Computer Science(all)

Cite this

Idris, M. I., Amin, N., Azam, M. A., Salehuddin, F., & Ghani, Z. A. (2015). Fabrication and analysis of micro contact based probe cell for IC testing. Research Journal of Applied Sciences, Engineering and Technology, 10(4), 376-384.

Fabrication and analysis of micro contact based probe cell for IC testing. / Idris, M. Idzdihar; Amin, Nowshad; Azam, M. A.; Salehuddin, F.; Ghani, Z. A.

In: Research Journal of Applied Sciences, Engineering and Technology, Vol. 10, No. 4, 2015, p. 376-384.

Research output: Contribution to journalArticle

Idris, MI, Amin, N, Azam, MA, Salehuddin, F & Ghani, ZA 2015, 'Fabrication and analysis of micro contact based probe cell for IC testing', Research Journal of Applied Sciences, Engineering and Technology, vol. 10, no. 4, pp. 376-384.
Idris, M. Idzdihar ; Amin, Nowshad ; Azam, M. A. ; Salehuddin, F. ; Ghani, Z. A. / Fabrication and analysis of micro contact based probe cell for IC testing. In: Research Journal of Applied Sciences, Engineering and Technology. 2015 ; Vol. 10, No. 4. pp. 376-384.
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