Experimental analysis on SU8-micromolding structure of PDMS (poly-dimethylsiloxane) based microfluidic channel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports experimental study of a microfluidic channel fabrication for bioparticles detection system. The microfluidic channel is fabricated by standard MEMS soft photolithography process implementing negative photoresist SU-8 and poly-dimethylsiloxane (PDMS). Based on the characterization process in the fabrication, an optimum structure of PDMS microfluidic has been achieved. A proper UV exposure dosage can be identified through the observation of the SU-8 mold film thickness and sidewalls profile produced in the characterization process. From this, UV expose for 60 s with exposure energy at 156 mJ/cm2 is considered as the optimal expose condition in this work. In addition, the difference between the PDMS microchannel pattern from the SU-8 mold are also observed. With these results, the produced structures can provide suitable channel formation for portable bioparticles detection purpose in lab on Chip applications.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages115-118
Number of pages4
ISBN (Print)9781479957606
DOIs
Publication statusPublished - 10 Oct 2014
Event11th IEEE International Conference on Semiconductor Electronics, ICSE 2014 - Kuala Lumpur
Duration: 27 Aug 201429 Aug 2014

Other

Other11th IEEE International Conference on Semiconductor Electronics, ICSE 2014
CityKuala Lumpur
Period27/8/1429/8/14

Fingerprint

Polydimethylsiloxane
Microfluidics
Fabrication
Photolithography
Photoresists
Microchannels
MEMS
Film thickness
baysilon

Keywords

  • Lab on a Chip
  • PDMS microfluidic
  • photolithography
  • SU-8 mold

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Masrie, M., Yeop Majlis, B., & Yunas, J. (2014). Experimental analysis on SU8-micromolding structure of PDMS (poly-dimethylsiloxane) based microfluidic channel. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 115-118). [6920809] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2014.6920809

Experimental analysis on SU8-micromolding structure of PDMS (poly-dimethylsiloxane) based microfluidic channel. / Masrie, Marianah; Yeop Majlis, Burhanuddin; Yunas, Jumril.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. p. 115-118 6920809.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Masrie, M, Yeop Majlis, B & Yunas, J 2014, Experimental analysis on SU8-micromolding structure of PDMS (poly-dimethylsiloxane) based microfluidic channel. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 6920809, Institute of Electrical and Electronics Engineers Inc., pp. 115-118, 11th IEEE International Conference on Semiconductor Electronics, ICSE 2014, Kuala Lumpur, 27/8/14. https://doi.org/10.1109/SMELEC.2014.6920809
Masrie M, Yeop Majlis B, Yunas J. Experimental analysis on SU8-micromolding structure of PDMS (poly-dimethylsiloxane) based microfluidic channel. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc. 2014. p. 115-118. 6920809 https://doi.org/10.1109/SMELEC.2014.6920809
Masrie, Marianah ; Yeop Majlis, Burhanuddin ; Yunas, Jumril. / Experimental analysis on SU8-micromolding structure of PDMS (poly-dimethylsiloxane) based microfluidic channel. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 115-118
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