Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer

Ahmad Alabqari, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper is presenting on the study of the electrostatic pull-in behaviors through simulation for 50g force balanced accelerometer. The simulation deals with several structures based on capacitive accelerometer type using Coventorware 2001.3. Analysis interest is to analyze the electrostatic force pull-in magnitude generated by applying DC voltage to the stator electrodes, and proofmass pull-in displacement for different configurations.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages663-667
Number of pages5
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Accelerometers
MEMS
Electrostatics
Electrostatic force
Stators
Electrodes
Electric potential

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Alabqari, A., & Yeop Majlis, B. (2004). Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 663-667). [1620972]

Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer. / Alabqari, Ahmad; Yeop Majlis, Burhanuddin.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 663-667 1620972.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Alabqari, A & Yeop Majlis, B 2004, Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620972, pp. 663-667, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Alabqari A, Yeop Majlis B. Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 663-667. 1620972
Alabqari, Ahmad ; Yeop Majlis, Burhanuddin. / Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 663-667
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