Electromagnetic micro-actuator with silicon membrane for fluids pump in drug delivery system

Roer Eka Pawinanto, Jumril Yunas, Aliyah Alwani, Nur Indah, Sagir Alva

Research output: Contribution to journalArticle

Abstract

An electromagnetic (EM) micro-actuator with silicon membrane has been fabricated and characterized. The studied silicon based membrane is used as an actuator of a micropump system driven by magnetic force. The actuator consists of two main parts, namely, the electromagnetic part that generates electromagnetic field and the magneto mechanical part that enables the membrane deformation depending on the magnetic force strength on the silicon membrane. A standard Micro Electronic Mechanical System (MEMS) process was implemented to fabricate the actuator with an additional bonding between the actuator membrane and electromagnetic coil. The measurement results show that the 20 μm thin silicone membrane is capable of deformation with a maximum membrane deflection of approximately 4.5 μm which will be useful for a reliable fluids pump in a continuous drug delivery system.

Original languageEnglish
Pages (from-to)576-579
Number of pages4
JournalInternational Journal of Mechanical Engineering and Robotics Research
Volume8
Issue number4
DOIs
Publication statusPublished - 1 Jan 2019

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Actuators
Pumps
Membranes
Silicon
Fluids
Drug Delivery Systems
Microelectronics
Silicones
Electromagnetic fields

Keywords

  • Drug delivery
  • Electromagnetic micro-actuator
  • Microfluidic pump
  • Silicon membrane

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Artificial Intelligence

Cite this

Electromagnetic micro-actuator with silicon membrane for fluids pump in drug delivery system. / Pawinanto, Roer Eka; Yunas, Jumril; Alwani, Aliyah; Indah, Nur; Alva, Sagir.

In: International Journal of Mechanical Engineering and Robotics Research, Vol. 8, No. 4, 01.01.2019, p. 576-579.

Research output: Contribution to journalArticle

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