Electrochemically deposited and etched membranes with precisely sized micropores for biological fluids microfiltration

Azrul Azlan Hamzah, H. E. Zainal Abidin, Burhanuddin Yeop Majlis, M. Mohd Nor, A. Ismardi, G. Sugandi, T. Y. Tiong, Chang Fu Dee, Jumril Yunas

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

This paper presents simple and economical, yet reliable techniques to fabricate a micro-fluidic filter for MEMS lab-on-chip (LoC) applications. The microporous filter is a crucial component in a MEMS LoC system. Microsized components and contaminants in biological fluids are selectively filtered using copper and silicon membranes with precisely controlled microsized pores. Two techniques were explored in microporous membrane fabrication, namely copper electroplating and electrochemical etching (ECE) of silicon. In the first technique, a copper membrane with evenly distributed micropores was fabricated by electroplating the copper layer on the silicon nitride membrane, which was later removed to leave the freestanding microporous membrane structure. The second approach involves the thinning of bulk silicon down to a few micrometers thick using KOH and etching the resulting silicon membrane in 5% HF by ECE to create micropores. Upon testing with nanoparticles of various sizes, it was observed that electroplated copper membrane passes nanoparticles up to 200 nm wide, while porous silicon membrane passes nanoparticles up to 380 nm in size. Due to process compatibility, simplicity, and low-cost fabrication, electroplated copper and porous silicon membranes enable synchronized microfilter fabrication and integration into the MEMS LoC system.

Original languageEnglish
Article number074007
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number7
DOIs
Publication statusPublished - Jul 2013

Fingerprint

Microfiltration
Membranes
Copper
Fluids
Silicon
MEMS
Electrochemical etching
Porous silicon
Electroplating
Nanoparticles
Fabrication
Membrane structures
Fluidics
Silicon nitride
Etching
Impurities
Testing

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

Cite this

Electrochemically deposited and etched membranes with precisely sized micropores for biological fluids microfiltration. / Hamzah, Azrul Azlan; Zainal Abidin, H. E.; Yeop Majlis, Burhanuddin; Mohd Nor, M.; Ismardi, A.; Sugandi, G.; Tiong, T. Y.; Dee, Chang Fu; Yunas, Jumril.

In: Journal of Micromechanics and Microengineering, Vol. 23, No. 7, 074007, 07.2013.

Research output: Contribution to journalArticle

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AU - Zainal Abidin, H. E.

AU - Yeop Majlis, Burhanuddin

AU - Mohd Nor, M.

AU - Ismardi, A.

AU - Sugandi, G.

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