Electrical humidity response of sol-gel processed LiCl-doped SiO 2 thin films

Idris Sabtu, Muhammad Azmi Abdul Hamid, Ibrahim Abu Talib, Muhamad Mat Salleh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this report SiO2 thin films were prepared by a sol-gel processing as sensitive humidity elements. Sol was prepared using tetraethylorthosilicate as a starting precursor. LiCl was added into the sol as a dopant to modify the humidity sensitivity of the films. The films were prepared by dipping the glass substrates in the sol. The humidity-sensitive electrical properties of the thin films were studied using d.c measurements in the working relative humidity range from 35 to 90%. It was found that an addition of 20% LiCl significantly improved the relative humidity response up to 3 times compared to undoped film.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages618-620
Number of pages3
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Sol-gels
Atmospheric humidity
Thin films
Sols
Electric properties
Doping (additives)
Glass
Substrates
Processing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Sabtu, I., Abdul Hamid, M. A., Talib, I. A., & Mat Salleh, M. (2004). Electrical humidity response of sol-gel processed LiCl-doped SiO 2 thin films. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 618-620). [1620962]

Electrical humidity response of sol-gel processed LiCl-doped SiO 2 thin films. / Sabtu, Idris; Abdul Hamid, Muhammad Azmi; Talib, Ibrahim Abu; Mat Salleh, Muhamad.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 618-620 1620962.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sabtu, I, Abdul Hamid, MA, Talib, IA & Mat Salleh, M 2004, Electrical humidity response of sol-gel processed LiCl-doped SiO 2 thin films. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620962, pp. 618-620, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Sabtu I, Abdul Hamid MA, Talib IA, Mat Salleh M. Electrical humidity response of sol-gel processed LiCl-doped SiO 2 thin films. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 618-620. 1620962
Sabtu, Idris ; Abdul Hamid, Muhammad Azmi ; Talib, Ibrahim Abu ; Mat Salleh, Muhamad. / Electrical humidity response of sol-gel processed LiCl-doped SiO 2 thin films. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 618-620
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