Efficient nanoporous silicon membranes for integrated microfluidic separation and sensing systems

Nazar Ileri, Sonia E. Létant, Jerald Britten, Hoang Nguyen, Cindy Larson, Saleem H. Zaidi, Ahmet Palazoglu, Roland Faller, Joseph W. Tringe, Pieter Stroeve

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Nanoporous devices constitute emerging platforms for selective molecule separation and sensing, with great potential for high throughput and economy in manufacturing and operation. Acting as mass transfer diodes similar to a solid-state device based on electron conduction, conical pores are shown to have superior performance characteristics compared to traditional cylindrical pores. Such phenomena, however, remain to be exploited for molecular separation. Here we present performance results from silicon membranes created by a new synthesis technique based on interferometric lithography. This method creates millimeter sized planar arrays of uniformly tapered nanopores in silicon with pore diameter 100 nm or smaller, ideally-suited for integration into a multi-scale microfluidic processing system. Molecular transport properties of these devices are compared against state-of-the-art polycarbonate track etched (PCTE) membranes. Mass transfer rates of up to fifteen-fold greater than commercial sieve technology are obtained. Complementary results from molecular dynamics simulations on molecular transport are reported.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Pages87-92
Number of pages6
Volume1191
Publication statusPublished - 2009
Externally publishedYes
Event2009 MRS Spring Meeting - San Francisco, CA
Duration: 13 Apr 200917 Apr 2009

Other

Other2009 MRS Spring Meeting
CitySan Francisco, CA
Period13/4/0917/4/09

Fingerprint

polycarbonate
Silicon
Microfluidics
Mass transfer
membranes
Membranes
porosity
Solid state devices
mass transfer
Nanopores
Sieves
silicon
Polycarbonates
Transport properties
Lithography
Molecular dynamics
solid state devices
sieves
Diodes
Throughput

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Ileri, N., Létant, S. E., Britten, J., Nguyen, H., Larson, C., Zaidi, S. H., ... Stroeve, P. (2009). Efficient nanoporous silicon membranes for integrated microfluidic separation and sensing systems. In Materials Research Society Symposium Proceedings (Vol. 1191, pp. 87-92)

Efficient nanoporous silicon membranes for integrated microfluidic separation and sensing systems. / Ileri, Nazar; Létant, Sonia E.; Britten, Jerald; Nguyen, Hoang; Larson, Cindy; Zaidi, Saleem H.; Palazoglu, Ahmet; Faller, Roland; Tringe, Joseph W.; Stroeve, Pieter.

Materials Research Society Symposium Proceedings. Vol. 1191 2009. p. 87-92.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ileri, N, Létant, SE, Britten, J, Nguyen, H, Larson, C, Zaidi, SH, Palazoglu, A, Faller, R, Tringe, JW & Stroeve, P 2009, Efficient nanoporous silicon membranes for integrated microfluidic separation and sensing systems. in Materials Research Society Symposium Proceedings. vol. 1191, pp. 87-92, 2009 MRS Spring Meeting, San Francisco, CA, 13/4/09.
Ileri N, Létant SE, Britten J, Nguyen H, Larson C, Zaidi SH et al. Efficient nanoporous silicon membranes for integrated microfluidic separation and sensing systems. In Materials Research Society Symposium Proceedings. Vol. 1191. 2009. p. 87-92
Ileri, Nazar ; Létant, Sonia E. ; Britten, Jerald ; Nguyen, Hoang ; Larson, Cindy ; Zaidi, Saleem H. ; Palazoglu, Ahmet ; Faller, Roland ; Tringe, Joseph W. ; Stroeve, Pieter. / Efficient nanoporous silicon membranes for integrated microfluidic separation and sensing systems. Materials Research Society Symposium Proceedings. Vol. 1191 2009. pp. 87-92
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