Effects of substrate on surface morphology, crystallinity, and photoluminescence properties of sputtered ZnO nano films

Javad Karamdel, Alireza Hadi, Chang Fu Dee, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Effects of substrate on crystallinity, surface morphology, and luminescence properties of radio frequency sputtered zinc oxide (ZnO) thin films were investigated. A variety of materials such as Si (100), Si (111), Al 2O 3, quartz, and silicon carbide (SiC) wafers were examined as substrates for deposition of ZnO thin films. The results showed smooth and uniform growth of c-axis orientation films. The thickness of the layers was about 50 nm. The average grain sizes of films were about 10, 13, and 12 nm for Si (111), quartz, and SiC samples, respectively. The deposited film on Al 2O 3 showed the largest grain size, about 500 nm. Grazing incidence x-ray diffraction patterns of the samples revealed that sputtered layers on Al 2O 3 and quartz had better crystallinity with higher peak at (002) orientation compared to Si and SiC substrates. Moreover, the Al 2O 3 sample exhibited a weak peak at position of (100) planes of ZnO too. The photoluminescence spectra of the samples showed a typical luminescence behavior with a broad UV band, including a main peak at around 388 nm and a weak shoulder peak at around 381 nm, corresponding with bound excitonic recombination and free excitonic recombination, respectively. The luminescence peak revealed that the intensity of UV emission is not necessarily dependent on the grain sizes and the micro-structural quality of ZnO films.

Original languageEnglish
Pages (from-to)203-207
Number of pages5
JournalIonics
Volume18
Issue number1-2
DOIs
Publication statusPublished - Jan 2012

Fingerprint

Zinc Oxide
Zinc oxide
zinc oxides
Quartz
Surface morphology
crystallinity
Photoluminescence
Silicon carbide
Oxide films
photoluminescence
Luminescence
silicon carbides
Substrates
quartz
grain size
luminescence
Thin films
Diffraction patterns
thin films
shoulders

Keywords

  • Sputtering
  • Substrate effects
  • ZnO nano film

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Engineering(all)
  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

Effects of substrate on surface morphology, crystallinity, and photoluminescence properties of sputtered ZnO nano films. / Karamdel, Javad; Hadi, Alireza; Dee, Chang Fu; Yeop Majlis, Burhanuddin.

In: Ionics, Vol. 18, No. 1-2, 01.2012, p. 203-207.

Research output: Contribution to journalArticle

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