Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications

Mimiwaty Mohd Noor, Gandi Sugandi, Mohd Faizal Aziz, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

The material selection for membrane is important in designing a microheater. A membrane is used as an insulator layer to prevent heat dissipation from the microheater to the substrate. At the same time, the thermal characteristic of the microheater is influenced by the insulator layer. A study on the effects of material and membrane structure on the maximum temperature of the microheater for gas sensor applications has been carried out using Heat Transfer Module of COMSOL 4.2. Three different membrane materials namely silicon nitride (Si3N4), silicon dioxide (SiO2) and polyimide and two types of membrane structures namely full-membrane and bridgemembrane have been chosen for the study. Their effects on the microheater temperature are presented. The resistive meander type of microheater is used in this study. The heater material is platinum. The thickness and the area of the heater are 2 μm and 600 μm × 680 μm respectively. The thickness of each membrane is 5 μm. The area of the full-membrane and the bridgemembrane are 2500 μm × 2500 μm and 850 μm × 850 μm respectively.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages255-258
Number of pages4
ISBN (Print)9781479957606
DOIs
Publication statusPublished - 10 Oct 2014
Event11th IEEE International Conference on Semiconductor Electronics, ICSE 2014 - Kuala Lumpur
Duration: 27 Aug 201429 Aug 2014

Other

Other11th IEEE International Conference on Semiconductor Electronics, ICSE 2014
CityKuala Lumpur
Period27/8/1429/8/14

Fingerprint

Membrane structures
Chemical sensors
Membranes
Temperature
Platinum
Silicon nitride
Heat losses
Polyimides
Silicon Dioxide
Silica
Heat transfer
Substrates

Keywords

  • Gas sensor
  • membrane
  • microheater
  • polyimide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Noor, M. M., Sugandi, G., Aziz, M. F., & Yeop Majlis, B. (2014). Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 255-258). [6920845] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2014.6920845

Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications. / Noor, Mimiwaty Mohd; Sugandi, Gandi; Aziz, Mohd Faizal; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. p. 255-258 6920845.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Noor, MM, Sugandi, G, Aziz, MF & Yeop Majlis, B 2014, Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 6920845, Institute of Electrical and Electronics Engineers Inc., pp. 255-258, 11th IEEE International Conference on Semiconductor Electronics, ICSE 2014, Kuala Lumpur, 27/8/14. https://doi.org/10.1109/SMELEC.2014.6920845
Noor MM, Sugandi G, Aziz MF, Yeop Majlis B. Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc. 2014. p. 255-258. 6920845 https://doi.org/10.1109/SMELEC.2014.6920845
Noor, Mimiwaty Mohd ; Sugandi, Gandi ; Aziz, Mohd Faizal ; Yeop Majlis, Burhanuddin. / Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 255-258
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