Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films

Rozidawati Awang, Saadah A. Rahman

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A series of hydrogenated amorphous carbon (a-C:H) thin films were deposited using home-built direct-current (DC) plasma enhanced chemical vapour deposition (PECVD) system. The a-C:H thin films were deposited using pure methane (CH4) gas diluted either with hydrogen (H) or helium (He). The effects of hydrogen and helium dilution on the photoluminescence (PL) properties and optical band gap (E04) were studied. The dependence of PL properties and optical energy gap on the film thickness has also been investigated. The characterization techniques used were optical transmission and photoluminescence spectroscopies. The sp2 cluster sizes were determined from Raman spectra are in the range of 5 to 7 nm. Hydrogen and helium dilution of methane strongly influences the PL efficiency of the a-C:H films. The PL efficiency are enhanced with increase in film thickness for a-C:H films prepared both from H and He diluted CH4. The optical energy gap of these films decreases with increase in H or He dilution and film thickness.

Original languageEnglish
Pages (from-to)265-269
Number of pages5
JournalSains Malaysiana
Volume37
Issue number3
Publication statusPublished - Sep 2008

Fingerprint

dilution
direct current
helium
vapor deposition
photoluminescence
carbon
hydrogen
film thickness
methane
thin films
Raman spectra
gases
spectroscopy

Keywords

  • Hydrogen and helium dilution
  • Hydrogenated amonphous carbon
  • Optical band gap
  • Photoluminescence

ASJC Scopus subject areas

  • General

Cite this

Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films. / Awang, Rozidawati; Rahman, Saadah A.

In: Sains Malaysiana, Vol. 37, No. 3, 09.2008, p. 265-269.

Research output: Contribution to journalArticle

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