Effects of alcohol diluents on nanopore structure of electrochemically etched silicon membrane

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

An efficient method to control the nanoporous structure of a silicon membrane is presented. Nanoporous silicon membrane plays an important role in separating nano-sized particles in biological applications. The nano-sized filter can be fabricated by controlling the various fabrication parameters like hydrofluoric acid (HF) concentration, type of doping and current density. This paper explores the effect of alcohol to the pore formation through the electrochemical etching process. The fabrication process starts with the thinning of a silicon substrate to produce the membrane and rapidly performing an electrochemical etch to produce the pores. The variation in alcohol used is studied to verify the pore structure and distribution on silicon substrate. There are three types of alcohol used in this experiment, namely ethanol, methanol and propanol. These alcohols are mixed with hydrofluoric acid (HF), forming an electrolyte aqueous solution for the electrochemical etch. Due to alcohol diluents effect, it is observed that circle and star shaped pore structures are produced using the electrochemical etching process. This variation in shape can be used in filtering biological particles for an artificial kidney in the future.

Original languageEnglish
Pages (from-to)160-167
Number of pages8
JournalMicroelectronic Engineering
Volume141
DOIs
Publication statusPublished - 15 Jun 2015

Fingerprint

diluents
Nanopores
Silicon
alcohols
Alcohols
membranes
Membranes
Hydrofluoric Acid
silicon
porosity
Electrochemical etching
Hydrofluoric acid
hydrofluoric acid
Pore structure
etching
Fabrication
1-Propanol
fabrication
kidneys
Propanol

Keywords

  • Alcohol
  • Electrochemical etch
  • Hydrofluoric acid (HF)
  • Nanoporous
  • Silicon membrane

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

Cite this

Effects of alcohol diluents on nanopore structure of electrochemically etched silicon membrane. / Burham, Norhafizah; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

In: Microelectronic Engineering, Vol. 141, 15.06.2015, p. 160-167.

Research output: Contribution to journalArticle

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