Effect of surface passivation by a low pressure and temperature environment-grown thermal oxide layer for multi-crystalline silicon solar cells

Shun Sing Liao, Chuan Lung Chuang, Yueh Chin Lin, Chang Fu Dee, Burhanuddin Yeop Majlis, Edward Yi Chang

Research output: Contribution to journalArticle

Abstract

In this study, we show that the efficiency and carrier life time of multi-crystalline silicon solar cells were significantly improved by using a low pressure (20,000 Pa) and temperature (650 °C~750 °C) environment grown thermal oxide (TO) as the surface passivation layer. In this experiment, during the first stage, the oxidation process was done at 650 °C and a lower pressure of 20,000 Pa for 2 mins under the flow a gas mixture of N2/O2 in ratio of 2:1. In the second stage, a temperature of 750 °C was used at the same pressure for the post-growth annealing process under a pure N2 ambient for 25 mins. Consequently, conversion efficiency was significantly increased by 0.55% with the surface passivation layer grown by low pressure and temperature TO process. The sheet resistance, carrier lifetime, internal quantum efficiency (IQE), increased by 6.32 Ω/sq., 22.18 μs, 4.33%, respectively, and the average reflection was reduced of 0.62%. Thus, the low pressure and temperature thermal oxidation process was an efficient way to increase the efficiency of the multi-crystalline silicon solar cells.

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalThin Solid Films
Volume660
DOIs
Publication statusPublished - 30 Aug 2018

Fingerprint

thermal environments
Silicon solar cells
Passivation
Oxides
passivity
low pressure
solar cells
Crystalline materials
oxides
carrier lifetime
Carrier lifetime
Temperature
oxidation
Oxidation
Sheet resistance
gas mixtures
quantum efficiency
Quantum efficiency
Gas mixtures
Conversion efficiency

Keywords

  • Low pressure
  • Multi-crystalline
  • Solar cell
  • Surface passivation
  • Thermal oxidation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Effect of surface passivation by a low pressure and temperature environment-grown thermal oxide layer for multi-crystalline silicon solar cells. / Liao, Shun Sing; Chuang, Chuan Lung; Lin, Yueh Chin; Dee, Chang Fu; Yeop Majlis, Burhanuddin; Chang, Edward Yi.

In: Thin Solid Films, Vol. 660, 30.08.2018, p. 1-9.

Research output: Contribution to journalArticle

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AU - Yeop Majlis, Burhanuddin

AU - Chang, Edward Yi

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