Effect of substrate temperature on gold-catalyzed silicon nanostructures growth by hot-wire chemical vapor deposition (HWCVD)

Su Kong Chong, Boon Tong Goh, Zarina Aspanut, Muhamad Rasat Muhamad, Chang Fu Dee, Saadah Abdul Rahman

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The effect of substrate temperature on the structural property of the silicon nanostructures deposited on gold-coated crystal silicon substrate by hot-wire chemical vapor deposition (HWCVD) was studied. The uniformity and size of the as-grown silicon nanostructures is highly influenced by the substrate temperature. XRD, Raman and HRTEM measurements show the silicon nanostructures consist of small crystallites embedded within amorphous matrix. The crystallite size of the as-grown silicon nanostructures decreases with increases in substrate temperature. FTIR shows that these silicon nanostructures are highly disordered for sample prepared at substrate temperature above 250 °C. The correlation of crystallinity and structure disorder of the silicon nanostructures growth at different substrate temperature was discussed.

Original languageEnglish
Pages (from-to)3320-3324
Number of pages5
JournalApplied Surface Science
Volume257
Issue number8
DOIs
Publication statusPublished - 1 Feb 2011

Fingerprint

Silicon
Gold
Chemical vapor deposition
Nanostructures
Wire
Substrates
Temperature
Crystallite size
Crystallites
Structural properties
Crystals

Keywords

  • Crystallinity
  • HRTEM
  • HWCVD
  • Microstructure parameter
  • Silicon nanostructures

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Effect of substrate temperature on gold-catalyzed silicon nanostructures growth by hot-wire chemical vapor deposition (HWCVD). / Chong, Su Kong; Goh, Boon Tong; Aspanut, Zarina; Muhamad, Muhamad Rasat; Dee, Chang Fu; Rahman, Saadah Abdul.

In: Applied Surface Science, Vol. 257, No. 8, 01.02.2011, p. 3320-3324.

Research output: Contribution to journalArticle

Chong, Su Kong ; Goh, Boon Tong ; Aspanut, Zarina ; Muhamad, Muhamad Rasat ; Dee, Chang Fu ; Rahman, Saadah Abdul. / Effect of substrate temperature on gold-catalyzed silicon nanostructures growth by hot-wire chemical vapor deposition (HWCVD). In: Applied Surface Science. 2011 ; Vol. 257, No. 8. pp. 3320-3324.
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