Effect of N2 composition ratio and annealing on morphology and optical properties of a-CNx thin films

N. F H Aziz, R. Ritikos, S. A A Kamal, N. A. Abdullah, Rozidawati Awang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency plasma enhanced chemical vapor deposition (rf-PECVD) technique. A set of a-CNx thin films were prepared using pure methane (CH 4) gas diluted with nitrogen (N2) gas. The N2 to CH4 flow rate ratios calculated as N2/(N 2+CH4) were varied at 20, 30, 50, 60 and 70 %. These samples were then annealed at 400°C in a quartz tube furnace in argon (Ar) gas. The effects of N2 dilution and thermal annealing on the structural and optical properties of these samples were studied. A surface profilometer was used to measure film thickness. A field emission scanning electron microscopy (FESEM) and a ultraviolet-visible spectrophotometer (UV-Vis) measurements were used to determine their structural and optical properties, respectively. The thickness of the as-deposited films decreased with increased N2 composition ratio. However, the thickness increased when these films were annealed. The FESEM images showed that the grain size of as-deposited and annealed films increased with the increased of N2 composition ratios. But the the grain size decreased with a more orderly arrangement after the annealing process. The energy gap (Eg) of the both set films increased with the increase in N2 composition ratio up to 50% and significantly decreased with further increased in N2 composition ratio. However, Eg is decreased when the films were annealed. The variations in the thickness and optical properties of these CNx films when annealed relate to modifications in the film structure.

Original languageEnglish
Title of host publicationAIP Conference Proceedings
Pages104-107
Number of pages4
Volume1528
DOIs
Publication statusPublished - 2013
Event2012 National Physics Conference, PERFIK 2012 - Bukit Tinggi, Pahang
Duration: 19 Nov 201221 Nov 2012

Other

Other2012 National Physics Conference, PERFIK 2012
CityBukit Tinggi, Pahang
Period19/11/1221/11/12

Fingerprint

optical properties
annealing
thin films
field emission
grain size
gases
profilometers
scanning electron microscopy
carbon nitrides
spectrophotometers
furnaces
dilution
radio frequencies
film thickness
methane
quartz
flow velocity
argon
vapor deposition
methylidyne

Keywords

  • carbon nitride
  • optical
  • thermal annealing

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Aziz, N. F. H., Ritikos, R., Kamal, S. A. A., Abdullah, N. A., & Awang, R. (2013). Effect of N2 composition ratio and annealing on morphology and optical properties of a-CNx thin films. In AIP Conference Proceedings (Vol. 1528, pp. 104-107) https://doi.org/10.1063/1.4803577

Effect of N2 composition ratio and annealing on morphology and optical properties of a-CNx thin films. / Aziz, N. F H; Ritikos, R.; Kamal, S. A A; Abdullah, N. A.; Awang, Rozidawati.

AIP Conference Proceedings. Vol. 1528 2013. p. 104-107.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aziz, NFH, Ritikos, R, Kamal, SAA, Abdullah, NA & Awang, R 2013, Effect of N2 composition ratio and annealing on morphology and optical properties of a-CNx thin films. in AIP Conference Proceedings. vol. 1528, pp. 104-107, 2012 National Physics Conference, PERFIK 2012, Bukit Tinggi, Pahang, 19/11/12. https://doi.org/10.1063/1.4803577
Aziz NFH, Ritikos R, Kamal SAA, Abdullah NA, Awang R. Effect of N2 composition ratio and annealing on morphology and optical properties of a-CNx thin films. In AIP Conference Proceedings. Vol. 1528. 2013. p. 104-107 https://doi.org/10.1063/1.4803577
Aziz, N. F H ; Ritikos, R. ; Kamal, S. A A ; Abdullah, N. A. ; Awang, Rozidawati. / Effect of N2 composition ratio and annealing on morphology and optical properties of a-CNx thin films. AIP Conference Proceedings. Vol. 1528 2013. pp. 104-107
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