Effect of hydrofluoric acid (HF) concentration to pores size diameter of silicon membrane

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

This paper studies parameters which affect the pore size diameter of a silicon membrane. Electrochemical etching is performed in characterise the parameter involved in this process. The parameter has been studied is volume ratio of hydrofluoric acid (HF) and ethanol as an electrolyte aqueous for electrochemical etch. This electrolyte aqueous solution has been mixed between HF and ethanol with volume ratio 3:7, 5:5, 7:3 and 9:1. As a result, the higher volume of HF in this electrolyte gives the smallest pore size diameter compared to the lower volume of HF. These samples have been dipped into HF and ethanol electrolyte aqueous with supplied 25 mA/cm2 current density for 20, 30, 40, and 50 minutes. The samples will inspect under Scanning Electron Microscope (SEM) to execute the pore formations on silicon membrane surface.

Original languageEnglish
Pages (from-to)2203-2209
Number of pages7
JournalBio-Medical Materials and Engineering
Volume24
Issue number6
DOIs
Publication statusPublished - 2014

Fingerprint

Hydrofluoric Acid
Hydrofluoric acid
Silicon
Pore size
Electrolytes
Membranes
Ethanol
Electrochemical etching
Current density
Electron microscopes
Scanning

Keywords

  • Electrochemical etch
  • Hydrofluoric acid (HF)
  • Nanoporous
  • Silicon membrane
  • Volume ratio

ASJC Scopus subject areas

  • Biomedical Engineering
  • Biomaterials

Cite this

Effect of hydrofluoric acid (HF) concentration to pores size diameter of silicon membrane. / Burham, Norhafizah; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

In: Bio-Medical Materials and Engineering, Vol. 24, No. 6, 2014, p. 2203-2209.

Research output: Contribution to journalArticle

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