Effect of doping to the pore structure and pore diameter on silicon membrane surface

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper studies parameters which affect the pore diameter of silicon membranes. The fabrication process starts with thinning the silicon substrate to get a membrane thickness of 8 μm. An electrochemical etch is carried out to produce the pores on the silicon membrane surface. The main parameter studied is the type of doping of the silicon substrate, which could be un-doped, phosphorus doped or boron doped. The pore geometry and pore diameter are observed in this experimental setup to clarify the effect of doping on the silicon substrate. Due to this setup, the development of nanoporous silicon membrane can be used in micro/nano filtration especially in bioMEMS applications.

Original languageEnglish
Title of host publicationProceedings - 2015 2nd International Conference on Biomedical Engineering, ICoBE 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479917495
DOIs
Publication statusPublished - 1 Sep 2015
Event2nd International Conference on Biomedical Engineering, ICoBE 2015 - Penang, Malaysia
Duration: 30 Mar 201531 Mar 2015

Other

Other2nd International Conference on Biomedical Engineering, ICoBE 2015
CountryMalaysia
CityPenang
Period30/3/1531/3/15

Fingerprint

Pore structure
Doping (additives)
Membranes
Silicon
Substrates
Nanofiltration
Boron
Phosphorus
Fabrication
Geometry

ASJC Scopus subject areas

  • Biomedical Engineering

Cite this

Burham, N., Hamzah, A. A., & Yeop Majlis, B. (2015). Effect of doping to the pore structure and pore diameter on silicon membrane surface. In Proceedings - 2015 2nd International Conference on Biomedical Engineering, ICoBE 2015 [7235888] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICoBE.2015.7235888

Effect of doping to the pore structure and pore diameter on silicon membrane surface. / Burham, N.; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

Proceedings - 2015 2nd International Conference on Biomedical Engineering, ICoBE 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7235888.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Burham, N, Hamzah, AA & Yeop Majlis, B 2015, Effect of doping to the pore structure and pore diameter on silicon membrane surface. in Proceedings - 2015 2nd International Conference on Biomedical Engineering, ICoBE 2015., 7235888, Institute of Electrical and Electronics Engineers Inc., 2nd International Conference on Biomedical Engineering, ICoBE 2015, Penang, Malaysia, 30/3/15. https://doi.org/10.1109/ICoBE.2015.7235888
Burham N, Hamzah AA, Yeop Majlis B. Effect of doping to the pore structure and pore diameter on silicon membrane surface. In Proceedings - 2015 2nd International Conference on Biomedical Engineering, ICoBE 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 7235888 https://doi.org/10.1109/ICoBE.2015.7235888
Burham, N. ; Hamzah, Azrul Azlan ; Yeop Majlis, Burhanuddin. / Effect of doping to the pore structure and pore diameter on silicon membrane surface. Proceedings - 2015 2nd International Conference on Biomedical Engineering, ICoBE 2015. Institute of Electrical and Electronics Engineers Inc., 2015.
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