Effect of different TiO 2 preparation techniques on the performance of the dielectric bolometer Ba 06Sr 0.4TiO 3 as a distance sensor

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this study TiO 2 films have been prepared using two different techniques i.e. sol-gel and electron gun evaporation (e-gun) techniques. The films were annealed at 300, 350 and 400oC in air. The microstructure study using field emission scanning electron microscope and x-ray diffractometer showed nanometer grains size and only the film prepared by sol-gel and annealed at 400oC has anatase phase while others are amorphous. To study the effect of the films (as buffer layer) onto the dielectric bolometer Ba 0.6Sr 0.4TiO 3 as distance sensor, sensors with the configuration of Al/BST/TiO 2/RuO 2/SiO 2/Si were built. Two different measurements i.e. with and without infrared source were carried out to measure the sensitivity and repeatability of the sensors. The sensors which contained sol-gel TiO 2 films gave reading for both type of measurements, indicating that the sensor can act as active and passive sensors. However, the sensors which contained e-gun TiO 2 films only gave responses when the IR source was used, indicating that they can only act as passive sensors. The most sensitive sensor was TiO 2 film prepared by sol gel and annealed at 350°C. In general sensors which contained TiO 2 films prepared by sol gel showed good repeatability.

Original languageEnglish
Pages (from-to)1029-1035
Number of pages7
JournalSains Malaysiana
Volume41
Issue number8
Publication statusPublished - Aug 2012

Fingerprint

bolometers
preparation
sensors
gels
electron guns
evaporation
diffractometers
anatase
field emission
buffers
electron microscopes
grain size
microstructure
scanning
sensitivity
air

Keywords

  • Sol-gel
  • Thin film
  • TiO

ASJC Scopus subject areas

  • General

Cite this

@article{0b3a7097d848493c8898012d62d6d3d2,
title = "Effect of different TiO 2 preparation techniques on the performance of the dielectric bolometer Ba 06Sr 0.4TiO 3 as a distance sensor",
abstract = "In this study TiO 2 films have been prepared using two different techniques i.e. sol-gel and electron gun evaporation (e-gun) techniques. The films were annealed at 300, 350 and 400oC in air. The microstructure study using field emission scanning electron microscope and x-ray diffractometer showed nanometer grains size and only the film prepared by sol-gel and annealed at 400oC has anatase phase while others are amorphous. To study the effect of the films (as buffer layer) onto the dielectric bolometer Ba 0.6Sr 0.4TiO 3 as distance sensor, sensors with the configuration of Al/BST/TiO 2/RuO 2/SiO 2/Si were built. Two different measurements i.e. with and without infrared source were carried out to measure the sensitivity and repeatability of the sensors. The sensors which contained sol-gel TiO 2 films gave reading for both type of measurements, indicating that the sensor can act as active and passive sensors. However, the sensors which contained e-gun TiO 2 films only gave responses when the IR source was used, indicating that they can only act as passive sensors. The most sensitive sensor was TiO 2 film prepared by sol gel and annealed at 350°C. In general sensors which contained TiO 2 films prepared by sol gel showed good repeatability.",
keywords = "Sol-gel, Thin film, TiO",
author = "Ibrahim, {Noor Baa`Yah} and E. Yusrianto and Zahari Ibarahim",
year = "2012",
month = "8",
language = "English",
volume = "41",
pages = "1029--1035",
journal = "Sains Malaysiana",
issn = "0126-6039",
publisher = "Penerbit Universiti Kebangsaan Malaysia",
number = "8",

}

TY - JOUR

T1 - Effect of different TiO 2 preparation techniques on the performance of the dielectric bolometer Ba 06Sr 0.4TiO 3 as a distance sensor

AU - Ibrahim, Noor Baa`Yah

AU - Yusrianto, E.

AU - Ibarahim, Zahari

PY - 2012/8

Y1 - 2012/8

N2 - In this study TiO 2 films have been prepared using two different techniques i.e. sol-gel and electron gun evaporation (e-gun) techniques. The films were annealed at 300, 350 and 400oC in air. The microstructure study using field emission scanning electron microscope and x-ray diffractometer showed nanometer grains size and only the film prepared by sol-gel and annealed at 400oC has anatase phase while others are amorphous. To study the effect of the films (as buffer layer) onto the dielectric bolometer Ba 0.6Sr 0.4TiO 3 as distance sensor, sensors with the configuration of Al/BST/TiO 2/RuO 2/SiO 2/Si were built. Two different measurements i.e. with and without infrared source were carried out to measure the sensitivity and repeatability of the sensors. The sensors which contained sol-gel TiO 2 films gave reading for both type of measurements, indicating that the sensor can act as active and passive sensors. However, the sensors which contained e-gun TiO 2 films only gave responses when the IR source was used, indicating that they can only act as passive sensors. The most sensitive sensor was TiO 2 film prepared by sol gel and annealed at 350°C. In general sensors which contained TiO 2 films prepared by sol gel showed good repeatability.

AB - In this study TiO 2 films have been prepared using two different techniques i.e. sol-gel and electron gun evaporation (e-gun) techniques. The films were annealed at 300, 350 and 400oC in air. The microstructure study using field emission scanning electron microscope and x-ray diffractometer showed nanometer grains size and only the film prepared by sol-gel and annealed at 400oC has anatase phase while others are amorphous. To study the effect of the films (as buffer layer) onto the dielectric bolometer Ba 0.6Sr 0.4TiO 3 as distance sensor, sensors with the configuration of Al/BST/TiO 2/RuO 2/SiO 2/Si were built. Two different measurements i.e. with and without infrared source were carried out to measure the sensitivity and repeatability of the sensors. The sensors which contained sol-gel TiO 2 films gave reading for both type of measurements, indicating that the sensor can act as active and passive sensors. However, the sensors which contained e-gun TiO 2 films only gave responses when the IR source was used, indicating that they can only act as passive sensors. The most sensitive sensor was TiO 2 film prepared by sol gel and annealed at 350°C. In general sensors which contained TiO 2 films prepared by sol gel showed good repeatability.

KW - Sol-gel

KW - Thin film

KW - TiO

UR - http://www.scopus.com/inward/record.url?scp=84864661587&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84864661587&partnerID=8YFLogxK

M3 - Article

VL - 41

SP - 1029

EP - 1035

JO - Sains Malaysiana

JF - Sains Malaysiana

SN - 0126-6039

IS - 8

ER -