Effect of current density on silicon surface in electrochemical etching

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A simple and reliable fabrication technique for producing nanoporous filters is presented. The nanoporous filter plays an important role in biomedical microelectromechanical systems applications, especially in filtering out waste and solute from inside human blood. Nanosized components in the biological fluid are filtered using silicon membranes that are controlled by nanosized pores. The technique explored was the electrochemical etching (ECE) process of silicon. This approach starts with thinning the bulk silicon until only several micrometres thick using the KOH process and then carry out ECE to produce pores. The yield of the process was a 3 ìm thick nanoporous silicon membrane with pore sizes of less than 100 nm. This physical characteristic enables the membrane to filter all the waste and solute particles of less than 100 nm. Owing to this simple and reliable method, the development of nanoporous silicon membrane can be used in nanofiltration applications especially in an artificial kidney.

Original languageEnglish
Pages (from-to)850-853
Number of pages4
JournalMicro and Nano Letters
Volume9
Issue number12
DOIs
Publication statusPublished - 1 Dec 2014

Fingerprint

Electrochemical etching
Silicon
Current density
etching
current density
membranes
Membranes
silicon
porosity
filters
solutes
Nanofiltration
kidneys
Pore size
microelectromechanical systems
blood
MEMS
micrometers
Blood
Fabrication

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Bioengineering
  • Biomedical Engineering

Cite this

Effect of current density on silicon surface in electrochemical etching. / Burham, Norhafizah; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

In: Micro and Nano Letters, Vol. 9, No. 12, 01.12.2014, p. 850-853.

Research output: Contribution to journalArticle

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