Dynamic characteristics of circular and square graphene diaphragm for capacitive microphone

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This research focuses on the diaphragm design of the graphene MEMS capacitive microphone. Simulation part will be first involved in order to get the optimum dimensions of each elements by COMSOL multiphysics simulation software. This study will discussed on mechanical behavior of graphene diaphragm for MEMS capacitive microphone. First stage will implicated a theoretical model of diaphragm MEMS capacitive microphone. Then, boundary element based simulation with some mathematical formula will be used to design and evaluate the model. The output value of selective parameters such as the thickness and diameter of diaphragm, air gap and others are crucial in order to further fabricate the MEMS capacitive microphone. The proposed design of graphene diaphragm are in circular shape and square shape. The mechanical sensitivity of diaphragm with the pressure changes will be the crucial parameters in early stage. The results revealed that the circular shape diaphragm shows the better deflection with the thicker diaphragm gives the lower deflection. Von mises stress for both diaphragm shape also recorded in order to avoid the failure of the proposed design.

Original languageEnglish
Title of host publicationEngineering and Innovative Materials V
PublisherTrans Tech Publications Ltd
Pages243-247
Number of pages5
Volume889 MSF
ISBN (Print)9783038357704
DOIs
Publication statusPublished - 2017
Event5th International Conference on Engineering and Innovative Materials, ICEIM 2016 - Kuala Lumpur, Malaysia
Duration: 10 Sep 201612 Sep 2016

Publication series

NameMaterials Science Forum
Volume889 MSF
ISSN (Print)02555476

Other

Other5th International Conference on Engineering and Innovative Materials, ICEIM 2016
CountryMalaysia
CityKuala Lumpur
Period10/9/1612/9/16

Fingerprint

Graphite
diaphragms
Microphones
Diaphragms
microphones
dynamic characteristics
Graphene
graphene
microelectromechanical systems
MEMS
deflection
Insulator Elements
simulation
computer programs
output
sensitivity
air

Keywords

  • COMSOL Multiphysics
  • Deflection
  • Graphene diaphragm
  • MEMS capacitive microphone
  • Von mises stress

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Mohd Mustapha, H., Mohamed, M. A., Hamzah, A. A., & Yeop Majlis, B. (2017). Dynamic characteristics of circular and square graphene diaphragm for capacitive microphone. In Engineering and Innovative Materials V (Vol. 889 MSF, pp. 243-247). (Materials Science Forum; Vol. 889 MSF). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.889.243

Dynamic characteristics of circular and square graphene diaphragm for capacitive microphone. / Mohd Mustapha, Haslinawati; Mohamed, Mohd Ambri; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

Engineering and Innovative Materials V. Vol. 889 MSF Trans Tech Publications Ltd, 2017. p. 243-247 (Materials Science Forum; Vol. 889 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mohd Mustapha, H, Mohamed, MA, Hamzah, AA & Yeop Majlis, B 2017, Dynamic characteristics of circular and square graphene diaphragm for capacitive microphone. in Engineering and Innovative Materials V. vol. 889 MSF, Materials Science Forum, vol. 889 MSF, Trans Tech Publications Ltd, pp. 243-247, 5th International Conference on Engineering and Innovative Materials, ICEIM 2016, Kuala Lumpur, Malaysia, 10/9/16. https://doi.org/10.4028/www.scientific.net/MSF.889.243
Mohd Mustapha H, Mohamed MA, Hamzah AA, Yeop Majlis B. Dynamic characteristics of circular and square graphene diaphragm for capacitive microphone. In Engineering and Innovative Materials V. Vol. 889 MSF. Trans Tech Publications Ltd. 2017. p. 243-247. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.889.243
Mohd Mustapha, Haslinawati ; Mohamed, Mohd Ambri ; Hamzah, Azrul Azlan ; Yeop Majlis, Burhanuddin. / Dynamic characteristics of circular and square graphene diaphragm for capacitive microphone. Engineering and Innovative Materials V. Vol. 889 MSF Trans Tech Publications Ltd, 2017. pp. 243-247 (Materials Science Forum).
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