Distributed transmission line phase shifter using MEMS switches and inductors

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Distributed MEMS transmission line (DMTL) phase shifter has been developed using planar inductors. The design consists of a coplanar waveguide line capacitively and inductively loaded by the periodic set of electrostatic force actuated microelectromechanical system switches as capacitors and inductors. By applying a single bias voltage on the line, the characteristic impedance can be changed, which in turn changes the phase velocity of the line and creates a true time delay phase shift. The governing equations for the impedance and loss are derived. The ABCD matrix is defined for a unit and multi-cell DMTL phase shifter to extract scattering parameters equations. The device containing 15 cells calculated, simulated, and fabricated. Fabricated results show that the device can be considered as a new type of the DMTL phase shifter with small size, higher phase shift and acceptable scattering parameters.

Original languageEnglish
Pages (from-to)1173-1183
Number of pages11
JournalMicrosystem Technologies
Volume14
Issue number8
DOIs
Publication statusPublished - Aug 2008

Fingerprint

Phase shifters
inductors
transmission lines
microelectromechanical systems
MEMS
Electric lines
switches
Switches
Scattering parameters
Phase shift
phase shift
impedance
Telephone lines
Electrostatic force
Coplanar waveguides
Phase velocity
Bias voltage
cells
scattering
phase velocity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Distributed transmission line phase shifter using MEMS switches and inductors. / Afrang, Saeid; Yeop Majlis, Burhanuddin.

In: Microsystem Technologies, Vol. 14, No. 8, 08.2008, p. 1173-1183.

Research output: Contribution to journalArticle

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