Dimension optimization of a MEMS LC pressure sensor

Mohsen Nabipoor, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this work, an analytical method is introduced to optimize the structure of a MEMS LC pressure sensor based on the device pressure range, the maximum overload pressure, and other design constraints. The method can be applied to square and circular membrane sensors. The sensitivity of the LC structure is directly proportional to the sensitivity of its capacitor. To obtain the maximum sensitivity for a MEMS capacitor, the maximum displacement of the membrane under the maximum allowed pressure is used to determine the gap size between two electrodes. The ultimate stress of the membrane under the maximum overload pressure would define the length over thickness ratio of the membrane. To optimize the size of the LC structure, the total sensor area must be minimized. For a given resonant frequency, there would be a tradeoff between the size of the inductor and the capacitor. As a case study, the optimization method is employed to optimize the structure of a pressure sensor with a pressure range of 0100psi and an overload pressure of 200psi. The obtained optimum size for a square sensor is 2.2 mm and for a circular sensor is 2.5 mm.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages148-152
Number of pages5
DOIs
Publication statusPublished - 2008
Event2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008 - Johor Bahru, Johor
Duration: 25 Nov 200827 Nov 2008

Other

Other2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008
CityJohor Bahru, Johor
Period25/11/0827/11/08

Fingerprint

Pressure sensors
MEMS
Membranes
Capacitors
Sensors
Natural frequencies
Electrodes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Nabipoor, M., & Yeop Majlis, B. (2008). Dimension optimization of a MEMS LC pressure sensor. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 148-152). [4770296] https://doi.org/10.1109/SMELEC.2008.4770296

Dimension optimization of a MEMS LC pressure sensor. / Nabipoor, Mohsen; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. p. 148-152 4770296.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nabipoor, M & Yeop Majlis, B 2008, Dimension optimization of a MEMS LC pressure sensor. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4770296, pp. 148-152, 2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008, Johor Bahru, Johor, 25/11/08. https://doi.org/10.1109/SMELEC.2008.4770296
Nabipoor M, Yeop Majlis B. Dimension optimization of a MEMS LC pressure sensor. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. p. 148-152. 4770296 https://doi.org/10.1109/SMELEC.2008.4770296
Nabipoor, Mohsen ; Yeop Majlis, Burhanuddin. / Dimension optimization of a MEMS LC pressure sensor. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. pp. 148-152
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