Designing and modeling MEMS resonator in VHF range

M. Al-Khusheiny, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper a new structure of Clamped-Clamped Mixed μresonator (CCMR) of resonance frequency (fo) of 71 MHZ, motional resistance of 3.7 -KΩ and Q as high as 6230 is designed, modeled, and simulated using a two-layers-beam composed of Silicon Nitride and Cupper .Intellisuite simulator is used to model the mechanical properties of the new MEMS Resonator using a static displacement analysis, and helps to get the optimum values of the beams parameters: the effective spring constant and mass of the resonator were calculated. By calculating the effects due to mechanical non-linearity CCR, we can achieve and demonstrate a resonance frequency of 71 MHz in a Polysilicon surface micromachining technology which can be used to build a MEMS Filter.

Original languageEnglish
Title of host publication2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings
Pages271-276
Number of pages6
DOIs
Publication statusPublished - 2006
Event2006 25th International Conference on Microelectronics, MIEL 2006 - Belgrade
Duration: 14 May 200617 May 2006

Other

Other2006 25th International Conference on Microelectronics, MIEL 2006
CityBelgrade
Period14/5/0617/5/06

Fingerprint

MEMS
Resonators
Surface micromachining
Silicon nitride
Polysilicon
Simulators
Mechanical properties

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Al-Khusheiny, M., & Yeop Majlis, B. (2006). Designing and modeling MEMS resonator in VHF range. In 2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings (pp. 271-276). [1650945] https://doi.org/10.1109/ICMEL.2006.1650945

Designing and modeling MEMS resonator in VHF range. / Al-Khusheiny, M.; Yeop Majlis, Burhanuddin.

2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings. 2006. p. 271-276 1650945.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Al-Khusheiny, M & Yeop Majlis, B 2006, Designing and modeling MEMS resonator in VHF range. in 2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings., 1650945, pp. 271-276, 2006 25th International Conference on Microelectronics, MIEL 2006, Belgrade, 14/5/06. https://doi.org/10.1109/ICMEL.2006.1650945
Al-Khusheiny M, Yeop Majlis B. Designing and modeling MEMS resonator in VHF range. In 2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings. 2006. p. 271-276. 1650945 https://doi.org/10.1109/ICMEL.2006.1650945
Al-Khusheiny, M. ; Yeop Majlis, Burhanuddin. / Designing and modeling MEMS resonator in VHF range. 2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings. 2006. pp. 271-276
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