Design simulations of MEMS micropump by 3D fluid-structure interaction analysis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, a three-way approach in designing a piezoelectrically actuated valveless micropump based on MEMS bulk micromachining fabrication process has been presented. The designed piezoelectrically actuated valveless micropump (PAVM) is analyzed using the fluid-structure interaction method to accurately predict the working behavior of the micropump based on the fluid, structural and piezoelectric equations. The fluid-structure dynamic effects should be taken into account in detail, since it is not enough to understand the intended functions individually due to the increasing demands for accuracy. In view of that, a coupled-field electro-mechanical-fluidic model of the PAVM has been simulated using MemFSI™, a fluid-structure interaction (FSI) solver available in CoventorWare™ software package. Results obtained from the simulations are compared with analytical studies for verification purposes.

Original languageEnglish
Title of host publicationNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Pages677-680
Number of pages4
Volume2
Publication statusPublished - 2010
EventNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 - Anaheim, CA
Duration: 21 Jun 201024 Jun 2010

Other

OtherNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
CityAnaheim, CA
Period21/6/1024/6/10

Fingerprint

Fluid structure interaction
MEMS
Fluids
Micromachining
Fluidics
Software packages
Fabrication

Keywords

  • Fluid-structure interaction
  • Piezoelectrically actuated valveless micropump

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Johari, J., & Yeop Majlis, B. (2010). Design simulations of MEMS micropump by 3D fluid-structure interaction analysis. In Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 (Vol. 2, pp. 677-680)

Design simulations of MEMS micropump by 3D fluid-structure interaction analysis. / Johari, J.; Yeop Majlis, Burhanuddin.

Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010. Vol. 2 2010. p. 677-680.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Johari, J & Yeop Majlis, B 2010, Design simulations of MEMS micropump by 3D fluid-structure interaction analysis. in Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010. vol. 2, pp. 677-680, Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010, Anaheim, CA, 21/6/10.
Johari J, Yeop Majlis B. Design simulations of MEMS micropump by 3D fluid-structure interaction analysis. In Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010. Vol. 2. 2010. p. 677-680
Johari, J. ; Yeop Majlis, Burhanuddin. / Design simulations of MEMS micropump by 3D fluid-structure interaction analysis. Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010. Vol. 2 2010. pp. 677-680
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