Design optimization of MEMS dual-leg shaped piezoresistive microcantilever

Rosminazuin Ab Rahim, Badariah Bais, Burhanuddin Yeop Majlis, Sheik Fareed

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The performance was represented with mechanical displacement of the suspended PRM sensor with regards to various factors such as the microcantilever shape and geometrical dimensions, the materials and the effect of incorporating stress concentration region (SCR) on the device structure. In this research work, a single-layer piezoresistive microcantilever in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon is utilized. Two dual-leg shaped piezoresistive microcantilever designs have been proposed: piezoresistive microcantilever with and without a square hole. From the simulation results, it can be seen that the maximum displacement is observed at maximum microcantilever's length and minimum thickness. The incorporation of a square hole as an SCR not only shows a significant increase in Mises stress value but also in the displacement of the microcantilever structure. Single-crystalline Si was chosen as the device material for the fabrication of single-layer piezoresistive microcantilever due to its high piezoresistive coefficients and thermal conductivity.

Original languageEnglish
Title of host publicationProceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics
Pages379-382
Number of pages4
DOIs
Publication statusPublished - 2013
Event2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013 - Langkawi
Duration: 25 Sep 201327 Sep 2013

Other

Other2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013
CityLangkawi
Period25/9/1327/9/13

Fingerprint

MEMS
Stress concentration
Crystalline materials
Silicon
Thermal conductivity
Fabrication
Sensors
Design optimization

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Rahim, R. A., Bais, B., Yeop Majlis, B., & Fareed, S. (2013). Design optimization of MEMS dual-leg shaped piezoresistive microcantilever. In Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics (pp. 379-382). [6706555] https://doi.org/10.1109/RSM.2013.6706555

Design optimization of MEMS dual-leg shaped piezoresistive microcantilever. / Rahim, Rosminazuin Ab; Bais, Badariah; Yeop Majlis, Burhanuddin; Fareed, Sheik.

Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. p. 379-382 6706555.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rahim, RA, Bais, B, Yeop Majlis, B & Fareed, S 2013, Design optimization of MEMS dual-leg shaped piezoresistive microcantilever. in Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics., 6706555, pp. 379-382, 2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013, Langkawi, 25/9/13. https://doi.org/10.1109/RSM.2013.6706555
Rahim RA, Bais B, Yeop Majlis B, Fareed S. Design optimization of MEMS dual-leg shaped piezoresistive microcantilever. In Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. p. 379-382. 6706555 https://doi.org/10.1109/RSM.2013.6706555
Rahim, Rosminazuin Ab ; Bais, Badariah ; Yeop Majlis, Burhanuddin ; Fareed, Sheik. / Design optimization of MEMS dual-leg shaped piezoresistive microcantilever. Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. pp. 379-382
@inproceedings{ed1146880093497fa1a96f3124a43ca4,
title = "Design optimization of MEMS dual-leg shaped piezoresistive microcantilever",
abstract = "In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The performance was represented with mechanical displacement of the suspended PRM sensor with regards to various factors such as the microcantilever shape and geometrical dimensions, the materials and the effect of incorporating stress concentration region (SCR) on the device structure. In this research work, a single-layer piezoresistive microcantilever in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon is utilized. Two dual-leg shaped piezoresistive microcantilever designs have been proposed: piezoresistive microcantilever with and without a square hole. From the simulation results, it can be seen that the maximum displacement is observed at maximum microcantilever's length and minimum thickness. The incorporation of a square hole as an SCR not only shows a significant increase in Mises stress value but also in the displacement of the microcantilever structure. Single-crystalline Si was chosen as the device material for the fabrication of single-layer piezoresistive microcantilever due to its high piezoresistive coefficients and thermal conductivity.",
author = "Rahim, {Rosminazuin Ab} and Badariah Bais and {Yeop Majlis}, Burhanuddin and Sheik Fareed",
year = "2013",
doi = "10.1109/RSM.2013.6706555",
language = "English",
isbn = "9781479911837",
pages = "379--382",
booktitle = "Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics",

}

TY - GEN

T1 - Design optimization of MEMS dual-leg shaped piezoresistive microcantilever

AU - Rahim, Rosminazuin Ab

AU - Bais, Badariah

AU - Yeop Majlis, Burhanuddin

AU - Fareed, Sheik

PY - 2013

Y1 - 2013

N2 - In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The performance was represented with mechanical displacement of the suspended PRM sensor with regards to various factors such as the microcantilever shape and geometrical dimensions, the materials and the effect of incorporating stress concentration region (SCR) on the device structure. In this research work, a single-layer piezoresistive microcantilever in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon is utilized. Two dual-leg shaped piezoresistive microcantilever designs have been proposed: piezoresistive microcantilever with and without a square hole. From the simulation results, it can be seen that the maximum displacement is observed at maximum microcantilever's length and minimum thickness. The incorporation of a square hole as an SCR not only shows a significant increase in Mises stress value but also in the displacement of the microcantilever structure. Single-crystalline Si was chosen as the device material for the fabrication of single-layer piezoresistive microcantilever due to its high piezoresistive coefficients and thermal conductivity.

AB - In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The performance was represented with mechanical displacement of the suspended PRM sensor with regards to various factors such as the microcantilever shape and geometrical dimensions, the materials and the effect of incorporating stress concentration region (SCR) on the device structure. In this research work, a single-layer piezoresistive microcantilever in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon is utilized. Two dual-leg shaped piezoresistive microcantilever designs have been proposed: piezoresistive microcantilever with and without a square hole. From the simulation results, it can be seen that the maximum displacement is observed at maximum microcantilever's length and minimum thickness. The incorporation of a square hole as an SCR not only shows a significant increase in Mises stress value but also in the displacement of the microcantilever structure. Single-crystalline Si was chosen as the device material for the fabrication of single-layer piezoresistive microcantilever due to its high piezoresistive coefficients and thermal conductivity.

UR - http://www.scopus.com/inward/record.url?scp=84893541022&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893541022&partnerID=8YFLogxK

U2 - 10.1109/RSM.2013.6706555

DO - 10.1109/RSM.2013.6706555

M3 - Conference contribution

AN - SCOPUS:84893541022

SN - 9781479911837

SP - 379

EP - 382

BT - Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics

ER -