Design of tunable filter using fixed-fixed beam under uncertainty

Md Fokhrul Islam, M. A. Mohd Ali, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

Abstract

In this paper, a tunable bandpass filter using micro fixed-fixed beam structure is designed, simulated and fabricated. The tunable bandpass filter is designed by micromachined capacitive bridges, with an original passive topology. Full-wave electromagnetic simulations are performed to accurately predict the frequency response of the filter. The Monte Carlo approach is used to analyze the effect of parameter uncertainty for the fixed-fixed beam. Surface micromachining fabrication process is employed on the high resistivity silicon substrate which is compatiable with the new SiGe process. The fabricated filter occupies a chip area of 12 × 3 mm2 and achieved an insertion loss of less than 2 dB and return loss of less than -15 dB throughout the operation band, thereby tuning the filter centre frequency by 11% between 8.76 to 9.80 GHz.

Original languageEnglish
Pages (from-to)4619-4629
Number of pages11
JournalAustralian Journal of Basic and Applied Sciences
Volume4
Issue number10
Publication statusPublished - Oct 2010

Fingerprint

Bandpass filters
Surface micromachining
Insertion losses
Electromagnetic waves
Frequency response
Tuning
Topology
Fabrication
Silicon
Substrates
Uncertainty

Keywords

  • Fixed-fixed beam
  • Microelectromechanical systems (MEMS)
  • Tunable filter
  • Uncertainty analysis

ASJC Scopus subject areas

  • General

Cite this

Design of tunable filter using fixed-fixed beam under uncertainty. / Islam, Md Fokhrul; Mohd Ali, M. A.; Yeop Majlis, Burhanuddin.

In: Australian Journal of Basic and Applied Sciences, Vol. 4, No. 10, 10.2010, p. 4619-4629.

Research output: Contribution to journalArticle

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