Design of MEMS piezoelectric microgenerator using voltage and power optimization

Luay Yassin Taha, Burhanuddin Yeop Majlis, Ahmad Al Ali

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This work presents a design methodology of the MEMS piezoelectric microgenerator based on optimizing the voltage and power. A pulse input force is applied on the z-axis, and the generated average voltage and power are recorded. Next, voltage and power optimization are carried out by varying the device parameters and selecting the optimized parameters. The Optimization results indicate that optimum voltage and power occur at 6.07 V and 108.3 μW when load resistance = 1.7 MΩ, damping = 100 Ns/m and thickness to area ratio = 3460 1/m.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages313-316
Number of pages4
DOIs
Publication statusPublished - 2010
Event2010 IEEE International Conference on Semiconductor Electronics, ICSE 2010 - Melaka
Duration: 28 Jun 201030 Jun 2010

Other

Other2010 IEEE International Conference on Semiconductor Electronics, ICSE 2010
CityMelaka
Period28/6/1030/6/10

Fingerprint

MEMS
Electric potential
Damping

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Taha, L. Y., Yeop Majlis, B., & Al Ali, A. (2010). Design of MEMS piezoelectric microgenerator using voltage and power optimization. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 313-316). [5549370] https://doi.org/10.1109/SMELEC.2010.5549370

Design of MEMS piezoelectric microgenerator using voltage and power optimization. / Taha, Luay Yassin; Yeop Majlis, Burhanuddin; Al Ali, Ahmad.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2010. p. 313-316 5549370.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Taha, LY, Yeop Majlis, B & Al Ali, A 2010, Design of MEMS piezoelectric microgenerator using voltage and power optimization. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 5549370, pp. 313-316, 2010 IEEE International Conference on Semiconductor Electronics, ICSE 2010, Melaka, 28/6/10. https://doi.org/10.1109/SMELEC.2010.5549370
Taha LY, Yeop Majlis B, Al Ali A. Design of MEMS piezoelectric microgenerator using voltage and power optimization. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2010. p. 313-316. 5549370 https://doi.org/10.1109/SMELEC.2010.5549370
Taha, Luay Yassin ; Yeop Majlis, Burhanuddin ; Al Ali, Ahmad. / Design of MEMS piezoelectric microgenerator using voltage and power optimization. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2010. pp. 313-316
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