Design of a micromechanical system utilizing hydrogel force for controlling a microvalve

Masoomeh Tehranirokh, Burhanuddin Yeop Majlis, Badariah Bais

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A hydrogel actuated microsystem employed in controlling the opening-closing states of a microvalve is described. This microsystem consists of a flexible silicone rubber diaphragm with an attached silicon boss and a cantilever beam. Swelling of the hydrogel forces the bossed membrane and consequently the cantilever beam to be deflected. Simulations were done by FEM analysis and the results show enough deflections to open the valve and let the fluid flow through the microvalve.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages179-183
Number of pages5
DOIs
Publication statusPublished - 2008
Event2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008 - Johor Bahru, Johor
Duration: 25 Nov 200827 Nov 2008

Other

Other2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008
CityJohor Bahru, Johor
Period25/11/0827/11/08

Fingerprint

Hydrogel
Microsystems
Cantilever beams
Hydrogels
Silicone Elastomers
Silicon
Diaphragms
Silicones
Swelling
Flow of fluids
Rubber
Membranes
Finite element method

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Tehranirokh, M., Yeop Majlis, B., & Bais, B. (2008). Design of a micromechanical system utilizing hydrogel force for controlling a microvalve. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 179-183). [4770303] https://doi.org/10.1109/SMELEC.2008.4770303

Design of a micromechanical system utilizing hydrogel force for controlling a microvalve. / Tehranirokh, Masoomeh; Yeop Majlis, Burhanuddin; Bais, Badariah.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. p. 179-183 4770303.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tehranirokh, M, Yeop Majlis, B & Bais, B 2008, Design of a micromechanical system utilizing hydrogel force for controlling a microvalve. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4770303, pp. 179-183, 2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008, Johor Bahru, Johor, 25/11/08. https://doi.org/10.1109/SMELEC.2008.4770303
Tehranirokh M, Yeop Majlis B, Bais B. Design of a micromechanical system utilizing hydrogel force for controlling a microvalve. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. p. 179-183. 4770303 https://doi.org/10.1109/SMELEC.2008.4770303
Tehranirokh, Masoomeh ; Yeop Majlis, Burhanuddin ; Bais, Badariah. / Design of a micromechanical system utilizing hydrogel force for controlling a microvalve. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. pp. 179-183
@inproceedings{9d02688edae6460a87e19052efa65e94,
title = "Design of a micromechanical system utilizing hydrogel force for controlling a microvalve",
abstract = "A hydrogel actuated microsystem employed in controlling the opening-closing states of a microvalve is described. This microsystem consists of a flexible silicone rubber diaphragm with an attached silicon boss and a cantilever beam. Swelling of the hydrogel forces the bossed membrane and consequently the cantilever beam to be deflected. Simulations were done by FEM analysis and the results show enough deflections to open the valve and let the fluid flow through the microvalve.",
author = "Masoomeh Tehranirokh and {Yeop Majlis}, Burhanuddin and Badariah Bais",
year = "2008",
doi = "10.1109/SMELEC.2008.4770303",
language = "English",
isbn = "9781424425617",
pages = "179--183",
booktitle = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",

}

TY - GEN

T1 - Design of a micromechanical system utilizing hydrogel force for controlling a microvalve

AU - Tehranirokh, Masoomeh

AU - Yeop Majlis, Burhanuddin

AU - Bais, Badariah

PY - 2008

Y1 - 2008

N2 - A hydrogel actuated microsystem employed in controlling the opening-closing states of a microvalve is described. This microsystem consists of a flexible silicone rubber diaphragm with an attached silicon boss and a cantilever beam. Swelling of the hydrogel forces the bossed membrane and consequently the cantilever beam to be deflected. Simulations were done by FEM analysis and the results show enough deflections to open the valve and let the fluid flow through the microvalve.

AB - A hydrogel actuated microsystem employed in controlling the opening-closing states of a microvalve is described. This microsystem consists of a flexible silicone rubber diaphragm with an attached silicon boss and a cantilever beam. Swelling of the hydrogel forces the bossed membrane and consequently the cantilever beam to be deflected. Simulations were done by FEM analysis and the results show enough deflections to open the valve and let the fluid flow through the microvalve.

UR - http://www.scopus.com/inward/record.url?scp=65949124874&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65949124874&partnerID=8YFLogxK

U2 - 10.1109/SMELEC.2008.4770303

DO - 10.1109/SMELEC.2008.4770303

M3 - Conference contribution

SN - 9781424425617

SP - 179

EP - 183

BT - IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

ER -