Design of a high sensitivity structure for MEMS fingerprint sensor

Mitra Damghanian, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A novel capacitive pressure sensor structure for fingerprint sensor/imager application is described which has higher sensitivity and linearity compared to all reported prototypes. The protrusion also has got a new shape to achieve the maximum sensitivity. Simulations have been done by FEM analysis and the results show the great improvements in output parameters. The technique can be applied to other capacitive structures as well.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages177-184
Number of pages8
DOIs
Publication statusPublished - 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur
Duration: 29 Nov 20061 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CityKuala Lumpur
Period29/11/061/12/06

Fingerprint

Capacitive sensors
Pressure sensors
Image sensors
MEMS
Finite element method
Sensors

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Damghanian, M., & Yeop Majlis, B. (2006). Design of a high sensitivity structure for MEMS fingerprint sensor. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 177-184). [4266593] https://doi.org/10.1109/SMELEC.2006.381043

Design of a high sensitivity structure for MEMS fingerprint sensor. / Damghanian, Mitra; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 177-184 4266593.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Damghanian, M & Yeop Majlis, B 2006, Design of a high sensitivity structure for MEMS fingerprint sensor. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4266593, pp. 177-184, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381043
Damghanian M, Yeop Majlis B. Design of a high sensitivity structure for MEMS fingerprint sensor. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 177-184. 4266593 https://doi.org/10.1109/SMELEC.2006.381043
Damghanian, Mitra ; Yeop Majlis, Burhanuddin. / Design of a high sensitivity structure for MEMS fingerprint sensor. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. pp. 177-184
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