Design, fabrication and characterization of dielectrophoretic microelectrode array for particle capture

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Abstract

Purpose - The purpose of this study is to design and characterize the dielectrophoretic (DEP) microelectrodes with various array structure arrangements in order to produce optimum non-uniform electric field for particle capture. The DEP-electrodes with 2D electrode structure was fabricated and characterized to see the effect of electrode structure configuration on the capture capability of the cells suspending in the solution. Design/methodology/approach - The presented microelectrode array structures are made of planar conductive metal structure having same size and geometry. Dielectrophoretic force (F<inf>DEP</inf>) generated in the fluidic medium is initially simulated using COMSOL Multi-physics performed on two microelectrodes poles, which is then continued on three-pole microelectrodes. The proposed design is fabricated using standard MEMS fabrication process. Furthermore, the effect of different sinusoidal signals of 5, 10 and 15 volt peak to peak voltage (V<inf>pp</inf>) at fixed frequency of 1.5 MHz on capturing efficiency of microelectrodes were also investigated using graphite metalloids particles as the suspended particles in the medium. The graphite particles that are captured at the microelectrode edges are characterized over a given time period. Findings - Based on analysis, the capturing efficiency of microelectrodes at the microelectrode edges is increased as voltage input increases, confirming its dependency to the F<inf>DEP</inf> strength and direction of non-uniform electric field. This dependency to field consequently increases the surface area of the accumulated graphite. It is also showed that the minimum ratio of the surface accumulated area of captured graphite is 1, 2.75 and 9 μm2 for 5, 10 and 15 V<inf>pp</inf>, respectively. The simulation result also indicates a significant improvement on the performance of microelectrodes by implementing third pole in the design. The third pole effect the particles in the medium by creating stronger non-uniform electric field as well as more selective force toward the microelectrodes' edges. Originality/value - The microelectrode array arrangement is found as a reliable method to increase the strength and selectivity of non-uniform electric field distribution that affect F<inf>DEP</inf>. The presented findings are verified through experimental test and simulation results.

Original languageEnglish
Pages (from-to)96-102
Number of pages7
JournalMicroelectronics International
Volume32
Issue number2
DOIs
Publication statusPublished - 5 May 2015

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Microelectrodes
Fabrication
poles
graphite
fabrication
electric fields
Graphite
electrodes
Poles
Electric fields
metalloids
fluidics
electric potential
microelectromechanical systems
Electrodes
simulation
selectivity
methodology
Metalloids
physics

Keywords

  • Dielectrophoretic
  • Dielectrophoretic forces
  • Graphite metalloid capture
  • Microelectrode array

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

Cite this

@article{1d591d29c7714d34be7d10a9201e3d6d,
title = "Design, fabrication and characterization of dielectrophoretic microelectrode array for particle capture",
abstract = "Purpose - The purpose of this study is to design and characterize the dielectrophoretic (DEP) microelectrodes with various array structure arrangements in order to produce optimum non-uniform electric field for particle capture. The DEP-electrodes with 2D electrode structure was fabricated and characterized to see the effect of electrode structure configuration on the capture capability of the cells suspending in the solution. Design/methodology/approach - The presented microelectrode array structures are made of planar conductive metal structure having same size and geometry. Dielectrophoretic force (FDEP) generated in the fluidic medium is initially simulated using COMSOL Multi-physics performed on two microelectrodes poles, which is then continued on three-pole microelectrodes. The proposed design is fabricated using standard MEMS fabrication process. Furthermore, the effect of different sinusoidal signals of 5, 10 and 15 volt peak to peak voltage (Vpp) at fixed frequency of 1.5 MHz on capturing efficiency of microelectrodes were also investigated using graphite metalloids particles as the suspended particles in the medium. The graphite particles that are captured at the microelectrode edges are characterized over a given time period. Findings - Based on analysis, the capturing efficiency of microelectrodes at the microelectrode edges is increased as voltage input increases, confirming its dependency to the FDEP strength and direction of non-uniform electric field. This dependency to field consequently increases the surface area of the accumulated graphite. It is also showed that the minimum ratio of the surface accumulated area of captured graphite is 1, 2.75 and 9 μm2 for 5, 10 and 15 Vpp, respectively. The simulation result also indicates a significant improvement on the performance of microelectrodes by implementing third pole in the design. The third pole effect the particles in the medium by creating stronger non-uniform electric field as well as more selective force toward the microelectrodes' edges. Originality/value - The microelectrode array arrangement is found as a reliable method to increase the strength and selectivity of non-uniform electric field distribution that affect FDEP. The presented findings are verified through experimental test and simulation results.",
keywords = "Dielectrophoretic, Dielectrophoretic forces, Graphite metalloid capture, Microelectrode array",
author = "Buyong, {Muhamad Ramdzan} and Jumril Yunas and Hamzah, {Azrul Azlan} and {Yeop Majlis}, Burhanuddin and F. Larki and {Abd Aziz}, Norazreen",
year = "2015",
month = "5",
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doi = "10.1108/MI-10-2014-0041",
language = "English",
volume = "32",
pages = "96--102",
journal = "Microelectronics International",
issn = "1356-5362",
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T1 - Design, fabrication and characterization of dielectrophoretic microelectrode array for particle capture

AU - Buyong, Muhamad Ramdzan

AU - Yunas, Jumril

AU - Hamzah, Azrul Azlan

AU - Yeop Majlis, Burhanuddin

AU - Larki, F.

AU - Abd Aziz, Norazreen

PY - 2015/5/5

Y1 - 2015/5/5

N2 - Purpose - The purpose of this study is to design and characterize the dielectrophoretic (DEP) microelectrodes with various array structure arrangements in order to produce optimum non-uniform electric field for particle capture. The DEP-electrodes with 2D electrode structure was fabricated and characterized to see the effect of electrode structure configuration on the capture capability of the cells suspending in the solution. Design/methodology/approach - The presented microelectrode array structures are made of planar conductive metal structure having same size and geometry. Dielectrophoretic force (FDEP) generated in the fluidic medium is initially simulated using COMSOL Multi-physics performed on two microelectrodes poles, which is then continued on three-pole microelectrodes. The proposed design is fabricated using standard MEMS fabrication process. Furthermore, the effect of different sinusoidal signals of 5, 10 and 15 volt peak to peak voltage (Vpp) at fixed frequency of 1.5 MHz on capturing efficiency of microelectrodes were also investigated using graphite metalloids particles as the suspended particles in the medium. The graphite particles that are captured at the microelectrode edges are characterized over a given time period. Findings - Based on analysis, the capturing efficiency of microelectrodes at the microelectrode edges is increased as voltage input increases, confirming its dependency to the FDEP strength and direction of non-uniform electric field. This dependency to field consequently increases the surface area of the accumulated graphite. It is also showed that the minimum ratio of the surface accumulated area of captured graphite is 1, 2.75 and 9 μm2 for 5, 10 and 15 Vpp, respectively. The simulation result also indicates a significant improvement on the performance of microelectrodes by implementing third pole in the design. The third pole effect the particles in the medium by creating stronger non-uniform electric field as well as more selective force toward the microelectrodes' edges. Originality/value - The microelectrode array arrangement is found as a reliable method to increase the strength and selectivity of non-uniform electric field distribution that affect FDEP. The presented findings are verified through experimental test and simulation results.

AB - Purpose - The purpose of this study is to design and characterize the dielectrophoretic (DEP) microelectrodes with various array structure arrangements in order to produce optimum non-uniform electric field for particle capture. The DEP-electrodes with 2D electrode structure was fabricated and characterized to see the effect of electrode structure configuration on the capture capability of the cells suspending in the solution. Design/methodology/approach - The presented microelectrode array structures are made of planar conductive metal structure having same size and geometry. Dielectrophoretic force (FDEP) generated in the fluidic medium is initially simulated using COMSOL Multi-physics performed on two microelectrodes poles, which is then continued on three-pole microelectrodes. The proposed design is fabricated using standard MEMS fabrication process. Furthermore, the effect of different sinusoidal signals of 5, 10 and 15 volt peak to peak voltage (Vpp) at fixed frequency of 1.5 MHz on capturing efficiency of microelectrodes were also investigated using graphite metalloids particles as the suspended particles in the medium. The graphite particles that are captured at the microelectrode edges are characterized over a given time period. Findings - Based on analysis, the capturing efficiency of microelectrodes at the microelectrode edges is increased as voltage input increases, confirming its dependency to the FDEP strength and direction of non-uniform electric field. This dependency to field consequently increases the surface area of the accumulated graphite. It is also showed that the minimum ratio of the surface accumulated area of captured graphite is 1, 2.75 and 9 μm2 for 5, 10 and 15 Vpp, respectively. The simulation result also indicates a significant improvement on the performance of microelectrodes by implementing third pole in the design. The third pole effect the particles in the medium by creating stronger non-uniform electric field as well as more selective force toward the microelectrodes' edges. Originality/value - The microelectrode array arrangement is found as a reliable method to increase the strength and selectivity of non-uniform electric field distribution that affect FDEP. The presented findings are verified through experimental test and simulation results.

KW - Dielectrophoretic

KW - Dielectrophoretic forces

KW - Graphite metalloid capture

KW - Microelectrode array

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