Design consideration of membrane structure for thermal actuated micropump

Norihan Abdul Hamid, Jumril Yunas, Ali Reza Bahadorimehr, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Movable thin film membrane is one of the crucial part in a thermal actuated micropump development that acts as actuator to control the fluid flow. The working principle of this device is due to pressure exchange produced by thermal expansion of air in an isolated chamber. In this paper a deformation analysis of actuator membrane deposited on silicon substrate using Finite Element Analysis (FEM) is reported. The analysis is aimed to study the mechanical and physical behavior of the actuator structure. Parameters such as shape, size, dimension, material and thickness of the membrane are studied to find the optimum design. Correlation between the pressure and membrane structure are also observed. Simulation results show that circular membrane shape gives the largest deflection due to the lowest stress on its edges compared with other shapes of membrane at the same pressure. It is also found that membrane deformation decreases with the increasing of the thickness. However, only suitable deformation will be chosen for the pump application due to the limited chamber space. Comparisons at four types of membrane materials in this analysis indicate that polyimide has the largest deflection. Furthermore, polyimide shows the best capability to handle very hot temperatures since its melting point is very high. It is also elastic, robust and easy to fabricate. From the results, an appropriate membrane parameter selection are important in designing the thermal actuated micropump.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages42-45
Number of pages4
Volume254
DOIs
Publication statusPublished - 2011
EventInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS - Suntec
Duration: 26 Jun 20111 Jul 2011

Publication series

NameAdvanced Materials Research
Volume254
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS
CitySuntec
Period26/6/111/7/11

Fingerprint

Membrane structures
Membranes
Actuators
Polyimides
Hot Temperature
Thermal expansion
Melting point
Flow of fluids
Pumps
Finite element method
Thin films
Silicon
Substrates
Air

Keywords

  • Actuator
  • Drug delivery system
  • Membrane
  • MEMS
  • Micropump
  • Thermal expansion

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Hamid, N. A., Yunas, J., Bahadorimehr, A. R., & Yeop Majlis, B. (2011). Design consideration of membrane structure for thermal actuated micropump. In Advanced Materials Research (Vol. 254, pp. 42-45). (Advanced Materials Research; Vol. 254). https://doi.org/10.4028/www.scientific.net/AMR.254.42

Design consideration of membrane structure for thermal actuated micropump. / Hamid, Norihan Abdul; Yunas, Jumril; Bahadorimehr, Ali Reza; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 254 2011. p. 42-45 (Advanced Materials Research; Vol. 254).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hamid, NA, Yunas, J, Bahadorimehr, AR & Yeop Majlis, B 2011, Design consideration of membrane structure for thermal actuated micropump. in Advanced Materials Research. vol. 254, Advanced Materials Research, vol. 254, pp. 42-45, International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS, Suntec, 26/6/11. https://doi.org/10.4028/www.scientific.net/AMR.254.42
Hamid NA, Yunas J, Bahadorimehr AR, Yeop Majlis B. Design consideration of membrane structure for thermal actuated micropump. In Advanced Materials Research. Vol. 254. 2011. p. 42-45. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.254.42
Hamid, Norihan Abdul ; Yunas, Jumril ; Bahadorimehr, Ali Reza ; Yeop Majlis, Burhanuddin. / Design consideration of membrane structure for thermal actuated micropump. Advanced Materials Research. Vol. 254 2011. pp. 42-45 (Advanced Materials Research).
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