Design and simulation of a CMOS compatible open-ended multilayered actuator

Mohd Ismahadi Syono, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A doubly spring supported actuator/accelerometer has been designed and simulated based on a post-processing technique. The accelerometer is of area change type and can be self-tested. The multilayered feature allows the accelerometer to adjust its pull-in voltage accordingly without a comb drive feature built into it. AC and DC characteristics are presented together with analytical and simulation results.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages518-523
Number of pages6
Publication statusPublished - 2002
Event2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002 - Penang
Duration: 19 Dec 200221 Dec 2002

Other

Other2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002
CityPenang
Period19/12/0221/12/02

Fingerprint

Accelerometers
Actuators
Electric potential
Processing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Syono, M. I., & Yeop Majlis, B. (2002). Design and simulation of a CMOS compatible open-ended multilayered actuator. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 518-523). [1217877]

Design and simulation of a CMOS compatible open-ended multilayered actuator. / Syono, Mohd Ismahadi; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 518-523 1217877.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Syono, MI & Yeop Majlis, B 2002, Design and simulation of a CMOS compatible open-ended multilayered actuator. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 1217877, pp. 518-523, 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002, Penang, 19/12/02.
Syono MI, Yeop Majlis B. Design and simulation of a CMOS compatible open-ended multilayered actuator. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 518-523. 1217877
Syono, Mohd Ismahadi ; Yeop Majlis, Burhanuddin. / Design and simulation of a CMOS compatible open-ended multilayered actuator. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. pp. 518-523
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