Design and modeling of micromachined condenser MEMS loudspeaker using permanent magnet neodymium-iron-boron (Nd-Fe-B)

Fatima Lina Ayatollahi, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

There has been some work in recent years to produce MEMS speakers. Geometries have included diaphragm structures, cantilever beams, and thermally actuated, domes. The diaphragm skeleton is built out of the metal and glass layers of the CMOS chip, greatly reducing the layering ad patterning required, compared to other MEMS designs; "Brute multiplicity" is useful to circumvent the poor linearity of the individual elements; the number of elements determines the distortion of the total sound produced, not the quality of the transducer. The objective of this research focused on design a new way to produce the sound in rang of human hearing using micro speaker (on MEMS scale) and. study concerned about possibility of MEMS speaker fabrication.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages160-166
Number of pages7
DOIs
Publication statusPublished - 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur
Duration: 29 Nov 20061 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CityKuala Lumpur
Period29/11/061/12/06

Fingerprint

Loudspeakers
Neodymium
Permanent magnets
MEMS
Boron
Iron
Diaphragms
Acoustic waves
Domes
Audition
Cantilever beams
Transducers
Fabrication
Glass
Geometry
Metals

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ayatollahi, F. L., & Yeop Majlis, B. (2006). Design and modeling of micromachined condenser MEMS loudspeaker using permanent magnet neodymium-iron-boron (Nd-Fe-B). In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 160-166). [4266590] https://doi.org/10.1109/SMELEC.2006.381040

Design and modeling of micromachined condenser MEMS loudspeaker using permanent magnet neodymium-iron-boron (Nd-Fe-B). / Ayatollahi, Fatima Lina; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 160-166 4266590.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ayatollahi, FL & Yeop Majlis, B 2006, Design and modeling of micromachined condenser MEMS loudspeaker using permanent magnet neodymium-iron-boron (Nd-Fe-B). in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4266590, pp. 160-166, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381040
Ayatollahi FL, Yeop Majlis B. Design and modeling of micromachined condenser MEMS loudspeaker using permanent magnet neodymium-iron-boron (Nd-Fe-B). In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 160-166. 4266590 https://doi.org/10.1109/SMELEC.2006.381040
Ayatollahi, Fatima Lina ; Yeop Majlis, Burhanuddin. / Design and modeling of micromachined condenser MEMS loudspeaker using permanent magnet neodymium-iron-boron (Nd-Fe-B). IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. pp. 160-166
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