Design and FEM simulation study of a microflow sensor based on piezoresistive PDMS composite for microfluidic systems

Nadir Belgroune, A. Hassein-Bey, A. L S Hassein-Bey, A. Tahraoui, Burhanuddin Yeop Majlis, M. E A Benamar, R. Serhane

Research output: Contribution to journalArticle

Abstract

An electrical response of a microflow sensor would open a wide horizon of uses and should intensify the integration of MEMS (Micro-Electro-Mechanical-System) microfluidic-based LOC (Lab-On-Chip). This paper presents an original microflow sensor which will be able to measure a low fluid flow rate. The sensor is designed and optimized using a multiphysics modelling and FEM (Finite Element Method) simulations implemented on Comsol Multiphysics software. The sensing element made of CPDMS (Conductive PolyDiMethylSiloxane) consists in microbridge suspended into PDMS microchannel. The microbridge acts as a transducer. It converts the mechanical bending due to a fluid flow to an electrical signal using the piezoresistive property of the CPDMS. The numerical simulation results show that under specific geometrical parameters, the sensor has a sensitivity of 0.12 % ml−1 min for low flow rates. Furthermore, the simulation results also show that the laminar aspect of the flow is maintained and to avoid the strangling effect, a good equilibrium must be achieved between the microchannel height and the desired range of the microbridge dimensions. This work opens a horizon for microfluidic devices to measure a low flow rate using a piezoresistive effect giving access to an electrical response.

Original languageEnglish
Pages (from-to)1-10
Number of pages10
JournalMicrosystem Technologies
DOIs
Publication statusAccepted/In press - 3 Mar 2016

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Microfluidics
finite element method
Finite element method
composite materials
flow velocity
sensors
Sensors
Flow rate
Composite materials
Polydimethylsiloxane
microchannels
Microchannels
fluid flow
horizon
Flow of fluids
simulation
microfluidic devices
Transducers
transducers
chips

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Belgroune, N., Hassein-Bey, A., Hassein-Bey, A. L. S., Tahraoui, A., Yeop Majlis, B., Benamar, M. E. A., & Serhane, R. (Accepted/In press). Design and FEM simulation study of a microflow sensor based on piezoresistive PDMS composite for microfluidic systems. Microsystem Technologies, 1-10. https://doi.org/10.1007/s00542-016-2891-6

Design and FEM simulation study of a microflow sensor based on piezoresistive PDMS composite for microfluidic systems. / Belgroune, Nadir; Hassein-Bey, A.; Hassein-Bey, A. L S; Tahraoui, A.; Yeop Majlis, Burhanuddin; Benamar, M. E A; Serhane, R.

In: Microsystem Technologies, 03.03.2016, p. 1-10.

Research output: Contribution to journalArticle

Belgroune, Nadir ; Hassein-Bey, A. ; Hassein-Bey, A. L S ; Tahraoui, A. ; Yeop Majlis, Burhanuddin ; Benamar, M. E A ; Serhane, R. / Design and FEM simulation study of a microflow sensor based on piezoresistive PDMS composite for microfluidic systems. In: Microsystem Technologies. 2016 ; pp. 1-10.
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