Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator

Roer Eka Pawinanto, Jumril Yunas, Muzalifah Mohd Said, Mimiwaty Mohd Noor, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50μm/100μm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages487-490
Number of pages4
ISBN (Print)9781479957606
DOIs
Publication statusPublished - 10 Oct 2014
Event11th IEEE International Conference on Semiconductor Electronics, ICSE 2014 - Kuala Lumpur
Duration: 27 Aug 201429 Aug 2014

Other

Other11th IEEE International Conference on Semiconductor Electronics, ICSE 2014
CityKuala Lumpur
Period27/8/1429/8/14

Fingerprint

Printed circuit boards
MEMS
Actuators
Fabrication
Magnetic flux
Geometry
Costs

Keywords

  • magnetic actuator
  • MEMS
  • Planar micro-coil

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Pawinanto, R. E., Yunas, J., Said, M. M., Noor, M. M., & Yeop Majlis, B. (2014). Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 487-490). [6920904] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2014.6920904

Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator. / Pawinanto, Roer Eka; Yunas, Jumril; Said, Muzalifah Mohd; Noor, Mimiwaty Mohd; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. p. 487-490 6920904.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pawinanto, RE, Yunas, J, Said, MM, Noor, MM & Yeop Majlis, B 2014, Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 6920904, Institute of Electrical and Electronics Engineers Inc., pp. 487-490, 11th IEEE International Conference on Semiconductor Electronics, ICSE 2014, Kuala Lumpur, 27/8/14. https://doi.org/10.1109/SMELEC.2014.6920904
Pawinanto RE, Yunas J, Said MM, Noor MM, Yeop Majlis B. Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc. 2014. p. 487-490. 6920904 https://doi.org/10.1109/SMELEC.2014.6920904
Pawinanto, Roer Eka ; Yunas, Jumril ; Said, Muzalifah Mohd ; Noor, Mimiwaty Mohd ; Yeop Majlis, Burhanuddin. / Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 487-490
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