Design and fabrication of MEMS micropumps using double sided etching

Jumril Yunas, Juliana Johari, Azrul Azlan Hamzah, M. Mimiwaty, Ille C. Gebeshuber, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

In this paper, we report a simple technique for the fabrication of planar valveless micropumps. The technique utilizes MEMS fabrication methods by using a double sided etch technique. Instead of using several masks and process steps, an anisotropic wet etch technique at both sides of a silicon substrate is implemented at the same time for creating the pump membrane and the diffuser/nozzle elements. A planar diffuser and a nozzle element of the pump, as well as a ISO pm thick silicon membrane, are designed and fabricated using only three pattern process steps. An actuator-chamber and a pump-chamber with depths of 250μm are formed after 250 min KOH etching, while the diffuser/nozzle element with a depth of 50μm are sequentially formed after chamber forming. The process is simple and reproducible which opens the opportunity for fast prototyping of MEMS micropumps.

Original languageEnglish
Pages (from-to)44-47
Number of pages4
JournalJournal of Microelectronics and Electronic Packaging
Volume7
Issue number1
Publication statusPublished - 2010

Fingerprint

Diffusers (fluid)
MEMS
Etching
Nozzles
Pumps
Silicon
Fabrication
Membranes
Masks
Actuators
Substrates

Keywords

  • Design and fabrication
  • KOH etching
  • MEMS micropump
  • Planar valveless

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Computer Networks and Communications

Cite this

Design and fabrication of MEMS micropumps using double sided etching. / Yunas, Jumril; Johari, Juliana; Hamzah, Azrul Azlan; Mimiwaty, M.; Gebeshuber, Ille C.; Yeop Majlis, Burhanuddin.

In: Journal of Microelectronics and Electronic Packaging, Vol. 7, No. 1, 2010, p. 44-47.

Research output: Contribution to journalArticle

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