Design and fabrication of compact MEMS electromagnetic micro-actuator with planar micro-coil based on PCB

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3 Citations (Scopus)

Abstract

This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 μm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5% has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip.

Original languageEnglish
Pages (from-to)856-866
Number of pages11
JournalTelkomnika (Telecommunication Computing Electronics and Control)
Volume14
Issue number3
DOIs
Publication statusPublished - 2016

Fingerprint

Printed circuit boards
MEMS
Actuators
Fabrication
Membranes
Silicon
Fluidics
Permanent magnets
Dynamic response
Finite element method
Mechanical properties
Geometry

Keywords

  • Electromagnetic micro-actuator
  • MEMS
  • Planar micro-coil
  • Printed Circuit Board (PCB)
  • Silicon membrane

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

@article{0f887e53ddcd4316b28a304c2aa32552,
title = "Design and fabrication of compact MEMS electromagnetic micro-actuator with planar micro-coil based on PCB",
abstract = "This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 μm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5{\%} has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip.",
keywords = "Electromagnetic micro-actuator, MEMS, Planar micro-coil, Printed Circuit Board (PCB), Silicon membrane",
author = "Pawinanto, {Roer Eka} and Jumril Yunas and {Yeop Majlis}, Burhanuddin and Hamzah, {Azrul Azlan}",
year = "2016",
doi = "10.12928/TELKOMNIKA.v14i3.3998",
language = "English",
volume = "14",
pages = "856--866",
journal = "Telkomnika",
issn = "1693-6930",
publisher = "Institute of Advanced Engineering and Science (IAES)",
number = "3",

}

TY - JOUR

T1 - Design and fabrication of compact MEMS electromagnetic micro-actuator with planar micro-coil based on PCB

AU - Pawinanto, Roer Eka

AU - Yunas, Jumril

AU - Yeop Majlis, Burhanuddin

AU - Hamzah, Azrul Azlan

PY - 2016

Y1 - 2016

N2 - This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 μm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5% has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip.

AB - This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 μm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5% has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip.

KW - Electromagnetic micro-actuator

KW - MEMS

KW - Planar micro-coil

KW - Printed Circuit Board (PCB)

KW - Silicon membrane

UR - http://www.scopus.com/inward/record.url?scp=84994634444&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84994634444&partnerID=8YFLogxK

U2 - 10.12928/TELKOMNIKA.v14i3.3998

DO - 10.12928/TELKOMNIKA.v14i3.3998

M3 - Article

VL - 14

SP - 856

EP - 866

JO - Telkomnika

JF - Telkomnika

SN - 1693-6930

IS - 3

ER -