Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing Is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. According to the results, a clamped microphone with a 2.43×2.43-mm2 diaphragm and a slotted one with a 1.5-×1.5-mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33×10-6 pF/Pa for the clamped and 3.87 × 10-5 pF/Pa for the slotted microphone with a 0.5×0.5-mm2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The calculated pull-in voltage of the clamped microphone is 214 V, the measured pull-in voltage of the slotted one is 120 V. The pull-in voltage of the slotted microphone is about 50% decreased.

Original languageEnglish
Article number021112
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume8
Issue number2
DOIs
Publication statusPublished - 2009

Fingerprint

diaphragms
Microphones
Diaphragms
microphones
microelectromechanical systems
MEMS
chips
Fabrication
fabrication
sensitivity
clamped structures
Electric potential
electric potential
stiffness
Stiffness
Acoustic waves
acoustics

Keywords

  • Microelectromechanical systems
  • Microphone
  • Sensitivity
  • Slotted diaphragm
  • Small size
  • Stiffness

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

Cite this

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abstract = "A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing Is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. According to the results, a clamped microphone with a 2.43×2.43-mm2 diaphragm and a slotted one with a 1.5-×1.5-mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33×10-6 pF/Pa for the clamped and 3.87 × 10-5 pF/Pa for the slotted microphone with a 0.5×0.5-mm2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The calculated pull-in voltage of the clamped microphone is 214 V, the measured pull-in voltage of the slotted one is 120 V. The pull-in voltage of the slotted microphone is about 50{\%} decreased.",
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author = "Ganji, {Bahram Azizollah} and {Yeop Majlis}, Burhanuddin",
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N2 - A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing Is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. According to the results, a clamped microphone with a 2.43×2.43-mm2 diaphragm and a slotted one with a 1.5-×1.5-mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33×10-6 pF/Pa for the clamped and 3.87 × 10-5 pF/Pa for the slotted microphone with a 0.5×0.5-mm2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The calculated pull-in voltage of the clamped microphone is 214 V, the measured pull-in voltage of the slotted one is 120 V. The pull-in voltage of the slotted microphone is about 50% decreased.

AB - A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing Is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. According to the results, a clamped microphone with a 2.43×2.43-mm2 diaphragm and a slotted one with a 1.5-×1.5-mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33×10-6 pF/Pa for the clamped and 3.87 × 10-5 pF/Pa for the slotted microphone with a 0.5×0.5-mm2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The calculated pull-in voltage of the clamped microphone is 214 V, the measured pull-in voltage of the slotted one is 120 V. The pull-in voltage of the slotted microphone is about 50% decreased.

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