Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

60 Citations (Scopus)

Abstract

In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of the method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and the diaphragm to escape and thus reducing acoustical damping in the microphone. Spin-on-glass (SOG) was used as a sacrificial and isolating layer. Backplate is monocrystalline silicon wafer, that it is more stiff. This work will focus on design, simulation, fabrication and characterization of the microphone. The structure has a diaphragm thickness of 3 μm, a diaphragm size of 0.5 mm × 0.5 mm, and an air gap of 1.0 μm. The results show that the pull-in voltage is 105 V, the initial stress of evaporated aluminum diaphragm is around 1500 MPa and the zero bias capacitance of microphone is 2.12 pF. Comparing with the previous works, this microphone has several advantages: the holes have been made on diaphragm, therefore no need of KOH etching to make back chamber, in this way the chip size of each microphone is reduced. The fabrication process uses minimal number of layers and masks to reduce the fabrication cost.

Original languageEnglish
Pages (from-to)29-37
Number of pages9
JournalSensors and Actuators, A: Physical
Volume149
Issue number1
DOIs
Publication statusPublished - 15 Jan 2009

Fingerprint

diaphragms
Microphones
Diaphragms
Aluminum
microphones
microelectromechanical systems
MEMS
aluminum
Fabrication
fabrication
chips
Monocrystalline silicon
Electrodes
electrodes
air
Air
Silicon wafers
escape
Masks
Etching

Keywords

  • Al perforated diaphragm
  • MEMS microphone
  • Silicon backplate
  • SOG sacrificial layer

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Instrumentation

Cite this

Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm. / Ganji, Bahram Azizollah; Yeop Majlis, Burhanuddin.

In: Sensors and Actuators, A: Physical, Vol. 149, No. 1, 15.01.2009, p. 29-37.

Research output: Contribution to journalArticle

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