Design and fabrication of a MEMS 3D micro-transformer for low frequency applications

Mohammad Zayed Ahmed, M. S. Bhuyan, A. K M Tariqul Islam, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This study presents the fabrication of a 3D micro-transformer using MEMS technology in 10-600 kHz frequency range. The fabrication processes is developed for high-performance and low-cost realization with respect to planner design. The coil winding and the magnetic cores were fabricated by electro-deposition using copper and Ni/Fe Permalloy materials, respectively. In step-up configuration, the micro-transformer achieved 73.75% efficiency. The inductance achieved was 90 and 164 μH for primary and secondary coils, respectively. Characterization results and fabrication process of the fabricated transformer (2560×1240 μm) on alumina ceramic substrate are presented.

Original languageEnglish
Pages (from-to)237-244
Number of pages8
JournalAsian Journal of Scientific Research
Volume8
Issue number2
DOIs
Publication statusPublished - 2015

Fingerprint

transformers
microelectromechanical systems
low frequencies
fabrication
coils
magnetic cores
Permalloys (trademark)
inductance
electrodeposition
aluminum oxides
frequency ranges
ceramics
copper
configurations

Keywords

  • 3D
  • MEMS fabrication
  • micro-coil
  • Micro-Nano electromechanical systems
  • micro-transformer

ASJC Scopus subject areas

  • General

Cite this

Design and fabrication of a MEMS 3D micro-transformer for low frequency applications. / Ahmed, Mohammad Zayed; Bhuyan, M. S.; Tariqul Islam, A. K M; Yeop Majlis, Burhanuddin.

In: Asian Journal of Scientific Research, Vol. 8, No. 2, 2015, p. 237-244.

Research output: Contribution to journalArticle

Ahmed, Mohammad Zayed ; Bhuyan, M. S. ; Tariqul Islam, A. K M ; Yeop Majlis, Burhanuddin. / Design and fabrication of a MEMS 3D micro-transformer for low frequency applications. In: Asian Journal of Scientific Research. 2015 ; Vol. 8, No. 2. pp. 237-244.
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