Deposition and characterization of molybdenum thin film using direct current magnetron and atomic force microscopy

Muhtade Mustafa Aqil, Mohd Asyadi Azam, Mohd Faizal Aziz, Latif Rhonira

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

In this paper, pure molybdenum (Mo) thin film has been deposited on blank Si substrate by DC magnetron sputtering technique. The deposition condition for all samples has not been changed except for the deposition time in order to study the influence of time on the thickness and surface morphology of molybdenum thin film. The surface profiler has been used to measure the surface thickness. Atomic force microscopy technique was employed to investigate the roughness and grain structure of Mo thin film. The thickness and grain of molybdenum thin film layer has been found to increase with respect to time, while the surface roughness decreases.The average roughness, root mean square roughness, surface skewness, and surface kurtosis parameters are used to analyze the surface morphology of Mo thin film. Smooth surface has been observed. From grain analysis, a uniform grain distribution along the surface has been found.The obtained results allowed us to decide the optimal time to deposit molybdenum thin film layer of 20-100nm thickness and subsequently patterned as electrodes (source/drain) in carbon nanotube-channel transistor.

Original languageEnglish
Article number4862087
JournalJournal of Nanotechnology
Volume2017
DOIs
Publication statusPublished - 2017

Fingerprint

Molybdenum
Atomic force microscopy
Thin films
Surface roughness
Surface morphology
Molybdenum deposits
Carbon Nanotubes
Crystal microstructure
Magnetron sputtering
Carbon nanotubes
Transistors
Electrodes
Substrates

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Deposition and characterization of molybdenum thin film using direct current magnetron and atomic force microscopy. / Aqil, Muhtade Mustafa; Azam, Mohd Asyadi; Aziz, Mohd Faizal; Rhonira, Latif.

In: Journal of Nanotechnology, Vol. 2017, 4862087, 2017.

Research output: Contribution to journalArticle

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